METHOD OF MONITORING PROCESSING SYSTEM FOR PROCESSING SUBSTRATE
First Claim
1. A method of monitoring a processing system for processing a substrate, comprising:
- acquiring data from the processing system for a plurality of parameters, the data comprising a plurality of data values;
grouping the parameters into a plurality of sub-groups, each of the sub-groups comprising a plurality of correlated parameters;
constructing a principle components analysis (PCA) model from the data values for the correlated parameters in a first one of the sub-groups, comprising;
normalizing the data values in the first one of the sub-groups with a first weighting factor and a second weighting factor, wherein the first weighting factor is different from the second weighting factor; and
determining a statistical quantity using the PCA model.
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Abstract
A method of monitoring a processing system for processing a substrate is provided. The method includes the following steps: acquiring data from the processing system for a plurality of parameters, the data including a plurality of data values; grouping the parameters into a plurality of sub-groups, each of the sub-groups including a plurality of correlated parameters; constructing a principle components analysis (PCA) model from the data values for the correlated parameters in a first one of the sub-groups, including normalizing the data values in the first one of the sub-groups with a first weighting factor and a second weighting factor, wherein the first weighting factor is different from the second weighting factor; and determining a statistical quantity using the PCA model.
13 Citations
15 Claims
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1. A method of monitoring a processing system for processing a substrate, comprising:
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acquiring data from the processing system for a plurality of parameters, the data comprising a plurality of data values; grouping the parameters into a plurality of sub-groups, each of the sub-groups comprising a plurality of correlated parameters; constructing a principle components analysis (PCA) model from the data values for the correlated parameters in a first one of the sub-groups, comprising; normalizing the data values in the first one of the sub-groups with a first weighting factor and a second weighting factor, wherein the first weighting factor is different from the second weighting factor; and determining a statistical quantity using the PCA model. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of monitoring a processing system for processing a substrate, comprising:
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acquiring data from the processing system for a plurality of parameters in a first period of time, the data comprising a plurality of data values; grouping the parameters into a plurality of sub-groups, each of the sub-groups comprising a plurality of correlated parameters; constructing a principle components analysis (PCA) model from a first set of data values for the correlated parameters in a first one of the sub-groups; determining a statistical quantity using the PCA model; performing a prevention maintenance step to the processing system after the first period of time; acquiring a second set of data values for the correlated parameters in the first one of the sub-groups from the processing system in a second period of time after performing the prevention maintenance step; and determining an updated statistical quantity using a combination of the second set of data values and the PCA model. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15)
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Specification