PART TEMPERATURE MEASUREMENT DEVICE

• US 20180226222A1
• Filed: 02/07/2017
• Published: 08/09/2018
• Est. Priority Date: 02/07/2017
• Status: Active Grant

• Current Assignee: Rtx Corporation
• Original Assignee: United Technologies Corporation (Raytheon Technologies Corporation d/b/a RTX)
• Inventors: Neal, James W., Maloney, Michael J., Schlichting, Kevin W., Litton, David A.
• Granted Patent: US 10,643,821 B2
• Time in Patent Office: Days
• CPC Class Codes: C23C 14/243 Crucibles for source material C23C14/28, C23C14/30 take precedence
• CPC Class Codes: C23C 14/30 by electron bombardment
• CPC Class Codes: C23C 14/505 for rotation of the substrates
• CPC Class Codes: C23C 14/54 Controlling or regulating the coating process
• CPC Class Codes: G01K 1/14 Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
• CPC Class Codes: G01K 13/08 in rotary movement
• CPC Class Codes: G01K 7/02 using thermoelectric elements, e.g. thermocouples
• CPC Class Codes: G01N 25/00 Investigating or analyzing materials by the use of thermal means G01N3/00 - G01N23/00 take precedence
• CPC Class Codes: H01J 2237/2001 Maintaining constant desired temperature
• CPC Class Codes: H01J 2237/20214 Rotation
• CPC Class Codes: H01J 37/3005 Observing the objects or the point of impact on the object
• CPC Class Codes: H01J 37/3178 for applying thin layers on objects

Abstract

A system for measuring a temperature of a rotating workpiece comprises a deposition chamber, a crucible within the deposition chamber, an energy source, a drive system, a temperature sensor, first and second sensor wires, a dynamic electrical connection, and a control system. The crucible is configured to hold a deposition feedstock material. The energy source is configured to evaporate the deposition feedstock material. The drive system is configured to rotate the workpiece such that the evaporated deposition feedstock material can impinge the rotating workpiece. The temperature sensor is configured to sense the temperature of the rotating workpiece. The first and second sensor wires are electrically connected to the temperature sensor. The dynamic electrical connection is configured to electrically communicate the signal indicative of the sensed temperature from the rotatable workpiece holder to the stationary portion. The control system is configured to measure the temperature of the workpiece during rotation.

Claims

1. A system for measuring a temperature of a rotating workpiece, the system comprising:

a deposition chamber;

a crucible within the deposition chamber, the crucible configured to hold a deposition feedstock material;

an energy source configured to heat the deposition feedstock material in the crucible so as to evaporate the deposition feedstock material;

a drive system with a rotatable workpiece holder rotatably coupled to a stationary portion, the rotatable workpiece holder configured to receive the workpiece and to rotate the workpiece proximate the crucible such that at least a portion of the evaporated deposition feedstock material can impinge the rotating workpiece;

a temperature sensor coupled to the rotatable workpiece holder and configured to contact and rotate with the workpiece held by the rotatable workpiece holder so as to sense the temperature of the workpiece during rotation and to generate a signal indicative of the sensed temperature;

a first sensor wire and a second sensor wire electrically connected to the temperature sensor;

a dynamic electrical connection configured to electrically communicate the signal indicative of the sensed temperature from the rotatable workpiece holder to the stationary portion; and

a control system configured to measure, based on the electrically communicated signal indicative of the sensed temperature, the temperature of the workpiece during rotation.

2. The system of claim 1 further comprising a contact ring assembly comprising:

a housing attached to the stationary portion;

a cover configured to rotate relative to the housing, wherein the cover is attached to the rotatable workpiece holder;

a first rotating contact ring and a second rotating contact ring attached to the cover and electrically connected to the temperature sensor via a first sensor wire and a second sensor wire respectively; and

a first stationary contact ring and a second stationary contact ring disposed in the housing and surrounding the first and second rotating rings respectively, wherein the first and second stationary contact rings are configured to receive an electrical signal from the first and second rotating contact rings respectively.

3. The system of claim 2, wherein the first and second rotating contact rings and the first and second stationary contact rings comprise a slip-ring configuration.

4. The system of claim 2, wherein the contact ring assembly further comprises a first reference wire and a second reference wire electrically connected to the first and second stationary contact rings respectively and are configured to relay the electrical signal received from the first and second stationary contact rings to a reference sensor.

5. The system of claim 1, wherein the temperature sensor comprises a thermocouple.

6. The system of claim 5, wherein the thermocouple comprises a K-type thermocouple.

7. The system of claim 1, wherein the system is configured to measure a temperature of the workpiece as the workpiece is rotated.

8. The system of claim 1, wherein the system comprises an electron beam physical vapor deposition system.

9. A method of measuring temperature, the method comprising:

attaching a temperature sensor to a workpiece at a first location;

inserting a portion of a fixture with the workpiece into a deposition chamber of a vapor deposition system, wherein the vapor deposition system comprises;

a crucible within the deposition chamber, the crucible configured to hold a deposition feedstock material;

an energy source configured to heat the deposition feedstock material in the crucible so as to evaporate the deposition feedstock material;

a drive system with a rotatable workpiece holder rotatably coupled to a stationary portion, the rotatable workpiece holder configured to receive the workpiece and to rotate the workpiece proximate the crucible such that at least a portion of the evaporated deposition feedstock material can impinge the rotating workpiece;

a temperature sensor coupled to the rotatable workpiece holder and configured to contact and rotate with the workpiece held by the rotatable workpiece holder so as to sense the temperature of the workpiece during rotation and to generate a signal indicative of the sensed temperature;

a first sensor wire and a second sensor wire electrically connected to the temperature sensor;

a dynamic electrical connection configured to electrically communicate the signal indicative of the sensed temperature from the rotatable workpiece holder to the stationary portion;

a control system configured to measure, based on the electrically communicated signal indicative of the sensed temperature, the temperature of the workpiece during rotation; and

a contact ring assembly comprising;

a housing attached to the stationary portion;

a cover configured to rotate relative to the housing, wherein the cover is attached to the rotatable workpiece holder;

a first rotating contact ring and a second rotating attached to the cover and electrically connected to the temperature sensor via a first sensor wire and a second sensor wire respectively; and

a first stationary contact ring and a second stationary contact ring disposed in the housing and surrounding the first and second rotating rings respectively, wherein the first and second stationary contact rings are configured to receive an electrical signal from the first and second rotating contact rings respectively;

rotating the workpiece; and

measuring a temperature of the workpiece with the temperature sensor as the workpiece is rotated.

10. The method of claim 9 further comprising:

relaying a sensor electrical signal through the first and second sensor wires to the first and second rotating contact rings respectively, wherein the sensor electrical signal represents a voltage across the temperature sensor;

transmitting the sensor electrical signal from the first and second rotating contact rings to the first and second stationary contact rings respectively;

receiving the sensor electrical signal from the first and second rotating contact rings with the first and second stationary contact rings respectively;

relaying the sensor electrical signal to a reference juncture;

relaying the sensor electrical signal to a voltmeter and

measuring a difference in voltage with the voltmeter.

11. The method of claim 9 further comprising:

moving the temperature sensor to a second location on the workpiece; and

measuring a temperature of the second location.

12. The method of claim 11 further comprising:

moving the temperature sensor to multiple locations;

measuring temperatures of the multiple locations;

recording the temperatures of the multiple locations; and

performing an environmental study of the recorded temperatures.

13. A fixture for an electron beam physical vapor deposition system, the fixture comprising:

an arm;

a rake extending from the arm;

a crown gear bearing assembly attached to and rotatably engaged with the rake, wherein the crown gear bearing assembly comprises;

a stationary portion; and

a rotating portion configured to rotate relative to the stationary portion;

a workpiece holder configured to retain the workpiece within the deposition chamber, wherein the workpiece holder is attached to the rotating portion of the crown gear bearing assembly and is configured to rotate with the rotating portion of the crown gear bearing assembly relative to the stationary portion of the crown gear bearing assembly;

a thermocouple with a first sensor wire and a second sensor wire, the thermocouple configured to rotate with the workpiece holder relative to the stationary portion of the crown gear bearing assembly; and

a contact ring assembly comprising;

a housing attached to at least one of the arm and the rake;

a cover configured to rotate relative to the housing, wherein the cover is attached to the rotating portion of the crown gear bearing assembly;

a first rotating contact ring and a second rotating contact ring attached to the cover and electrically connected to the thermocouple via the first and second sensor wires; and

a first stationary contact ring and a second stationary contact ring disposed in the housing and surrounding the first and second rotating rings respectively, wherein the first and second stationary contact rings are configured to receive an electrical signal from the first and second rotating contact rings respectively, further wherein the first and second rotating contact rings and the first and second stationary contact rings comprise a slip-ring configuration.

14. The fixture of claim 13, wherein the thermocouple comprises a K-type thermocouple.

15. The fixture of claim 13, wherein the contact ring assembly further comprises a first reference wire and a second reference wire electrically connected to the first and second stationary contact rings respectively and are configured to relay the electrical signal received from the first and second stationary contact rings to a reference sensor.

16. The fixture of claim 13, wherein the thermocouple is configured to measure a temperature of the workpiece as the workpiece is rotated.