Three-Dimensional Vertical One-Time-Programmable Memory Comprising Schottky Diodes
First Claim
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1. A three-dimensional vertical read-only memory (3D-OTPV), comprising:
- a semiconductor substrate comprising a substrate circuit;
a plurality of vertically stacked horizontal address lines above said semiconductor circuit;
a plurality of memory holes through said horizontal address lines;
an antifuse layer formed on the sidewalls of said memory holes, wherein said antifuse layer is irreversibly switched from a high-resistance state to a low-resistance state during programming;
a plurality of vertical address line in said memory holes;
a plurality of OTP cells at the intersections of said horizontal address lines and said vertical address lines;
wherein a plurality of Schottky diodes are formed between said horizontal address lines and said vertical address lines.
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Abstract
The present invention discloses a three-dimensional vertical read-only memory (3D-OTPV) comprising Schottky diodes. It comprises a plurality of vertical OTP strings formed side-by-side on a substrate circuit. Each OTP string is vertical to the substrate and comprises a plurality of vertically stacked OTP cells. Each OTP cell comprises an antifuse layer. A plurality of Schottky diodes are formed between the horizontal address lines and the vertical address lines.
9 Citations
20 Claims
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1. A three-dimensional vertical read-only memory (3D-OTPV), comprising:
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a semiconductor substrate comprising a substrate circuit; a plurality of vertically stacked horizontal address lines above said semiconductor circuit; a plurality of memory holes through said horizontal address lines; an antifuse layer formed on the sidewalls of said memory holes, wherein said antifuse layer is irreversibly switched from a high-resistance state to a low-resistance state during programming; a plurality of vertical address line in said memory holes; a plurality of OTP cells at the intersections of said horizontal address lines and said vertical address lines; wherein a plurality of Schottky diodes are formed between said horizontal address lines and said vertical address lines. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A three-dimensional vertical read-only memory (3D-OTPV), comprising:
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a semiconductor substrate comprising a substrate circuit; a plurality of vertically stacked horizontal address lines above said semiconductor circuit, said horizontal address lines comprising at least a metallic material; a plurality of memory holes through said horizontal address lines; an antifuse layer formed on the sidewalls of said memory holes, wherein said antifuse layer is irreversibly switched from a high-resistance state to a low-resistance state during programming; a plurality of vertical address line in said memory holes, said vertical address lines comprising at least a doped semiconductor material; a plurality of OTP cells at the intersections of said horizontal address lines and said vertical address lines. - View Dependent Claims (12, 13, 14, 15)
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16. A three-dimensional vertical read-only memory (3D-OTPV), comprising:
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a semiconductor substrate comprising a substrate circuit; a plurality of vertically stacked horizontal address lines above said semiconductor circuit, said horizontal address lines comprising at least a doped semiconductor material; a plurality of memory holes through said horizontal address lines; an antifuse layer formed on the sidewalls of said memory holes, wherein said antifuse layer is irreversibly switched from a high-resistance state to a low-resistance state during programming; a plurality of vertical address line in said memory holes, said vertical address lines comprising at least a metallic material; a plurality of OTP cells at the intersections of said horizontal address lines and said vertical address lines. - View Dependent Claims (17, 18, 19, 20)
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Specification