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ALUMINA SINTERED BODY AND BASE SUBSTRATE FOR OPTICAL DEVICE

  • US 20180230020A1
  • Filed: 03/01/2018
  • Published: 08/16/2018
  • Est. Priority Date: 09/30/2015
  • Status: Active Grant
First Claim
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1. An alumina sintered body having:

  • a degree of c-plane orientation of 5% or more, which is determined by a Lotgering method using an X-ray diffraction profile in a range of 2θ

    =20°

    to 70°

    obtained under X-ray irradiation, and an XRC half width of 15.0°

    or less in rocking curve measurement;

    an F content of less than 0.99 mass ppm when measured by D-SIMS;

    a crystal grain diameter of 15 to 200 μ

    m; and

    25 or less pores having a diameter of 0.2 μ

    m to 1.0 μ

    m when a photograph of a viewing area 370.0 μ

    m in a vertical direction and 372.0 μ

    m in a horizontal direction taken at a magnification factor of 1000 is visually observed.

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