WET ETCHING OF SAMARIUM SELENIUM FOR PIEZOELECTRIC PROCESSING

• US 20180233378A1
• Filed: 01/13/2017
• Published: 08/16/2018
• Est. Priority Date: 01/13/2017
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Armstrong, Christine, Copel, Matthew W., Luo, Yu, Solomon, Paul M.
• Granted Patent: US 10,332,753 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 21/0256 Selenides
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD
• CPC Class Codes: H01L 21/32134 by liquid etching only
• CPC Class Codes: H10N 30/076 by vapour phase deposition
• CPC Class Codes: H10N 30/082 by etching, e.g. lithography
• CPC Class Codes: H10N 30/093 Forming inorganic materials
• CPC Class Codes: H10N 30/85 Piezoelectric or electrostrictive active materials
• CPC Class Codes: H10N 30/853 Ceramic compositions

Abstract

A subtractive forming method that includes providing a material stack including a samarium and selenium containing layer and an aluminum containing layer in direct contact with the samarium and selenium containing layer. The samarium component of the samarium and selenium containing layer of the exposed portion of the material stack is etched with an etch chemistry comprising citric acid and hydrogen peroxide that is selective to the aluminum containing layer. The hydrogen peroxide reacts with the aluminum containing layer to provide an oxide etch protectant surface on the aluminum containing layer, and the citric acid etches samarium selectively to the oxide etch protectant surface. Thereafter, a remaining selenium component of is removed by elevating a temperature of the selenium component.

Claims

1. A subtractive forming method comprising:

providing a material stack including a samarium and selenium containing layer and an aluminum containing layer in direct contact with the samarium and selenium containing layer;

masking said material stack to expose a portion of the material stack to be etched;

patterning the aluminum containing layer;

etching the samarium component of the samarium and selenium containing layer of the exposed portion of the material stack with an etch chemistry comprising citric acid and hydrogen peroxide that is selective to the aluminum containing layer, wherein the hydrogen peroxide reacts with the aluminum containing layer to provide an oxide etch protectant surface on the aluminum containing layer, and the citric acid etches samarium selectively to the oxide etch protectant surface; and

removing a remaining selenium component of the samarium and selenium containing layer in the exposed portion of the material stack by elevating a temperature of the selenium component above a heat of vaporization for the selenium component.

2. The method of claim 1, wherein the samarium and selenium containing layer comprises 10 at. % to 90 at. % samarium (Sm), and 90 at. % to 10 at. % selenium (Se).

3. The method of claim 1, wherein the aluminum containing layer comprises greater than 95 at. % aluminum (Al).

4. The method of claim 1, wherein the masking comprising forming a photoresist mask.

5. The method of claim 1, wherein the etch chemistry comprises hydrogen peroxide in an aqueous solution in an amount ranging from 1 wt/wt % to 20 wt/wt %, with citric acid present in the aqueous solution in an amount ranging from 1 wt/wt % to 20 wt/wt %.

6. The method of claim 1, wherein etching the samarium component of the samarium and selenium containing layer of the exposed portion of the material stack with the etch chemistry comprising citric acid and hydrogen peroxide comprises applying the etch chemistry to the material stack at room temperature.

7. The method of claim 1, wherein said etching the samarium component of the samarium and selenium containing layer of the exposed portion of the material stack with an etch chemistry comprising citric acid and hydrogen peroxide comprises a time period ranging from 15 seconds to 5 minutes.

8. The method of claim 1, wherein said removing the remaining selenium component of the samarium and selenium containing layer in the exposed portion of the material stack by elevating the temperature of the selenium component comprises heating the material stack following said etching in a furnace at a temperature greater than 100°

C. for a time period greater than 5 minutes.

9. The method of claim 8, wherein said heating the material stack comprises a nitrogen containing atmosphere.

10-20. -20. (canceled)