Method of Semiconductor Integrated Circuit Fabrication
First Claim
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1. A device comprising:
- a metal layer disposed over a substrate;
a catalyst layer disposed on the metal layer;
a plurality of carbon nanotubes (CNTs) disposed on the catalyst layer; and
a dielectric layer disposed adjacent to the plurality of CNTs.
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Abstract
A method of fabricating a semiconductor integrated circuit (IC) is disclosed. The method includes providing a substrate and depositing a conductive layer on the substrate. A patterned hard mask and a catalyst layer are formed on the conductive layer. The method further includes growing a plurality of carbon nanotubes (CNTs) from the catalyst layer and etching the conductive layer by using the CNTs and the patterned hard mask as an etching mask to form metal features.
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Citations
20 Claims
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1. A device comprising:
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a metal layer disposed over a substrate; a catalyst layer disposed on the metal layer; a plurality of carbon nanotubes (CNTs) disposed on the catalyst layer; and a dielectric layer disposed adjacent to the plurality of CNTs. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A device comprising:
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a first conductive feature and second conductive feature disposed over a semiconductor substrate; a catalyst layer disposed over the first conductive feature without being disposed over the second conductive feature; a plurality of carbon nanotubes (CNTs) extending from the catalyst layer; and a dielectric layer extending from the second conductive feature to at least one carbon nanotube from the plurality of CNTs. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A device comprising:
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a conductive layer disposed over a substrate; a catalyst layer disposed on the conductive layer; a plurality of carbon nanotubes (CNTs) extending from the catalyst layer; and a dielectric layer extending from the substrate to at least one of the CNTs. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification