Apparatus for Optical Fiber-to-Photonic Chip Connection and Associated Methods

• US 20180239095A1
• Filed: 02/22/2018
• Published: 08/23/2018
• Est. Priority Date: 02/23/2017
• Status: Active Grant

• Current Assignee: Ayar Labs, Inc.
• Original Assignee: Ayar Labs, Inc.
• Inventors: Wade, Mark, Sun, Chen, Fini, John, Meade, Roy Edward, Stojanovic, Vladimir, Wright, Alexandra
• Granted Patent: US 10,641,976 B2
• Time in Patent Office: Days
• CPC Class Codes: G02B 6/3636 the mechanical coupling means being grooves G02B6/3652 takes precedence
• CPC Class Codes: G02B 6/4214 the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device G02B6/4246 takes precedence
• CPC Class Codes: G02B 6/423 using guiding surfaces for the alignment
• CPC Class Codes: G02B 6/4239 Adhesive bonding; Encapsulation with polymer material
• CPC Class Codes: G02B 6/4283 with electrical insulation means
• CPC Class Codes: H01L 29/0649 Dielectric regions, e.g. SiO2 regions, air gaps

Abstract

A photonic chip includes a substrate, an electrical isolation region formed over the substrate, and a front end of line (FEOL) region formed over the electrical isolation region. The photonic chip also includes an optical coupling region. The electrical isolation region and the FEOL region and a portion of the substrate are removed within the optical coupling region. A top surface of a the substrate within the optical coupling region includes a plurality of grooves configured to receive and align a plurality of optical fibers. The grooves are formed at a vertical depth within the substrate to provide for alignment of optical cores of the plurality of optical fibers with the FEOL region when the plurality of optical fibers are positioned within the plurality of grooves within the optical coupling region.

Claims

1. A photonic chip, comprising:

a substrate;

an electrical isolation region formed over the substrate;

a front end of line region formed over the electrical isolation region, the front end of line region including transistors and electro-optic devices; and

an optical coupling region defined within a horizontal area extending inward from an edge of the photonic chip, wherein the electrical isolation region and the front end of line region are removed within the optical coupling region,

wherein a portion of the substrate is removed within the optical coupling region, and wherein a top surface of a remainder of the substrate within the optical coupling region includes a plurality of grooves configured to receive and align a corresponding plurality of optical fibers, the plurality of grooves formed to extend linearly across the optical coupling region from the edge of the photonic chip, wherein the plurality of grooves are formed at a vertical depth within the substrate to provide for alignment of optical cores of the plurality of optical fibers with the front end of line region when the plurality of optical fibers are positioned within the plurality of grooves within the optical coupling region.

2. The photonic chip as recited in claim 1, wherein the electrical isolation region is a buried oxide region.

3. The photonic chip as recited in claim 1, wherein the electrical isolation region includes one or more of a shallow trench isolation region and a deep trench isolation region.

4. The photonic chip as recited in claim 1, wherein the plurality of grooves has a number of grooves within a range extending from 2 to 200.

5. The photonic chip as recited in claim 1, wherein the plurality of grooves are formed in accordance with a groove pitch, the groove pitch measured perpendicularly within a horizontal plane between centerlines of adjacent grooves.

6. The photonic chip as recited in claim 5, wherein the groove pitch is greater than or equal to an outer diameter of each optical fiber within the plurality of optical fibers.

7. The photonic chip as recited in claim 5, wherein the groove pitch is greater than about 100 micrometers.

8. The photonic chip as recited in claim 5, wherein the groove pitch is about 127 micrometers or about 250 micrometers.

9. The photonic chip as recited in claim 1, further comprising:

a back end of line region formed over the front end of line region, the back end of line region including interlevel dielectric materials and metal interconnect structures, wherein the back end of line region is removed within the optical coupling region to accommodate positioning of the plurality of optical fibers within the optical coupling region.

10. The photonic chip as recited in claim 9, further comprising:

a plurality of holes each formed to extend through the back end of line region and through the front end of line region and through the electrical isolation region and through some of the substrate; and

a locally released region formed within the substrate near bottoms of the plurality of holes, the locally released region corresponding to a volume in which material of the substrate is removed to provide optical isolation for one or more optical structures within the front end of line region.

11. The photonic chip as recited in claim 10, wherein the plurality of holes and the locally released region within the substrate are backfilled with an optical isolating material.

12. The photonic chip as recited in claim 11, wherein the optical isolating material is one or more of air, silicon dioxide, polymethyl methacrylate (PMMA), SU-8 photoresist, silicon nitride, vacuum, benzocyclobutene (BCB), and dielectric material.

13. The photonic chip as recited in claim 1, further comprising:

at least one locally released region within the substrate in which material of the substrate is removed to provide optical isolation for one or more optical structures within the front end of line region, wherein the substrate is removed within the at least one locally released region through a vertical extent of the photonic chip extending from a bottom surface of the substrate to the electrical isolation region.

14. The photonic chip as recited in claim 13, wherein each of the at least one locally released region within the substrate is backfilled with an optical isolating material.

15. The photonic chip as recited in claim 14, wherein the optical isolating material is one or more of air, silicon dioxide, polymethyl methacrylate (PMMA), SU-8 photoresist, silicon nitride, vacuum, benzocyclobutene (BCB), and dielectric material.

16. The photonic chip as recited in claim 13, wherein the at least one locally released region within the substrate is formed next to the remainder of the substrate within the optical coupling region.

17. The photonic chip as recited in claim 13, wherein the at least one locally released region within the substrate includes at least two side-by-side positioned locally released regions separated from each other by a portion of the substrate configured to preserve mechanical integrity of the photonic chip.

18. A packaged photonic chip system, comprising:

a photonic chip including a substrate and an electrical isolation region formed over the substrate, the photonic chip including a front end of line region formed over the electrical isolation region, the front end of line region including transistors and electro-optic devices, the photonic chip including a back end of line region formed over the front end of line region, the back end of line region including interlevel dielectric materials and metal interconnect structures, the photonic chip including an optical coupling region defined within a horizontal area extending inward from an edge of the photonic chip,

wherein the electrical isolation region and the front end of line region and the back end of line region are removed within the optical coupling region, wherein a portion of the substrate is removed within the optical coupling region, and wherein a top surface of a remainder of the substrate within the optical coupling region includes a plurality of grooves configured to receive and align a corresponding plurality of optical fibers, the plurality of grooves formed to extend linearly across the optical coupling region from the edge of the photonic chip, wherein the plurality of grooves are formed to provide for optical alignment of the plurality of optical fibers with corresponding optical couplers within the front end of line region when the plurality of optical fibers are positioned within the plurality of grooves within the optical coupling region;

a package substrate including electrical connection pads; and

an electrical connection disposed between the photonic chip and the package substrate, the electrical connection configured to electrically connect some of the metal interconnect structures within the back end of line region to electrical connection pads of the package substrate,

wherein at least a portion of the package substrate is removed to accommodate positioning of the plurality of optical fibers within the optical coupling region.

19. The packaged photonic chip system as recited in claim 18, wherein a portion of the package substrate next to the optical coupling region is completely removed to accommodate positioning of the plurality of optical fibers within the optical coupling region.

20. The packaged photonic chip system as recited in claim 18, wherein the plurality of optical fibers are positioned within the plurality of grooves.

21. The packaged photonic chip system as recited in claim 20, wherein the plurality of optical fibers are secured within the plurality of grooves by an adhesive.

22. The packaged photonic chip system as recited in claim 18, wherein the plurality of grooves are formed at a vertical depth within the substrate to provide for alignment of optical cores of the plurality of optical fibers with the front end of line region when the plurality of optical fibers are positioned within the plurality of grooves within the optical coupling region.

23. The packaged photonic chip system as recited in claim 18, wherein the plurality of grooves are formed to provide for alignment between optical cores of the plurality of optical fibers and corresponding vertical optical couplers within the front end of line region when the plurality of optical fibers are positioned within the plurality of grooves within the optical coupling region, and

wherein each optical fiber in the plurality of optical fibers is terminated by an optical turning mechanism configured to turn light emitted from a core of the optical fiber into a corresponding vertical optical coupler within the front end of line region.