BOLTLESS SUBSTRATE SUPPORT ASSEMBLY

• US 20180261492A1
• Filed: 03/08/2017
• Published: 09/13/2018
• Est. Priority Date: 03/08/2017
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Hao, Fangli, Fu, Yuehong, Chen, Zhigang
• Granted Patent: US 10,460,978 B2
• Time in Patent Office: Days
• CPC Class Codes: C23C 16/4581 characterised by material of construction or surface finish of the means for supporting the substrate
• CPC Class Codes: C23C 16/4584 the substrate being rotated
• CPC Class Codes: C23C 16/505 using radio frequency discharges
• CPC Class Codes: H01J 2237/334 Etching
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32715 Workpiece holder
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/68742 characterised by a lifting arrangement, e.g. lift pins
• CPC Class Codes: H01L 21/68757 characterised by a coating or a hardness or a material
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support

Abstract

A substrate support includes a conductive baseplate arranged to support a ceramic layer. The conductive baseplate includes a first cavity extending along an axis perpendicular to a horizontal plane defined by the conductive baseplate. A coupling assembly is arranged within the first cavity. The coupling assembly includes a gear configured to rotate about the axis. A pin arranged within the first cavity extends along the axis through the gear and into a second cavity below the conductive baseplate. Rotation of the gear causes the pin to move upward or downward relative to the conductive baseplate. The pin is retained within the second cavity when the gear is rotated to cause the pin to move downward into the second cavity.

Claims

1. A substrate support, comprising:

a conductive baseplate arranged to support a ceramic layer, the conductive baseplate including a first cavity extending along an axis perpendicular to a horizontal plane defined by the conductive baseplate; and

a coupling assembly arranged within the first cavity, the coupling assembly comprising

a gear configured to rotate about the axis, and

a pin arranged within the first cavity, the pin extending along the axis through the gear and into a second cavity below the conductive baseplate, wherein rotation of the gear causes the pin to move upward or downward relative to the conductive baseplate, and wherein the pin is retained within the second cavity when the gear is rotated to cause the pin to move downward into the second cavity.

2. The substrate support of claim 1, wherein the second cavity is located within at least one of (i) an insulative baseplate arranged below the conductive baseplate and (ii) a lower wall of a substrate processing chamber.

3. The substrate support of claim 1, wherein the conductive baseplate is arranged on an insulative baseplate, and wherein the second cavity is located within the insulative baseplate.

4. The substrate support of claim 1, wherein the conductive baseplate is arranged on a bottom surface of a substrate processing chamber, and wherein the second cavity is located below the bottom surface of the substrate processing chamber.

5. The substrate support of claim 1, wherein the conductive baseplate is arranged on an insulative baseplate, wherein the insulative baseplate is arranged on a bottom surface of a substrate processing chamber, and wherein the second cavity extends through the insulative baseplate and below the bottom surface of the substrate processing chamber.

6. The substrate support of claim 1, wherein the second cavity includes a nut, and wherein the pin is retained within the nut in the second cavity.

7. The substrate support of claim 1, wherein rotation of the gear causes rotation of the pin.

8. The substrate support of claim 1, wherein at least one of an outer surface of the pin, an inner surface of the gear, and an inner surface of the first cavity is threaded.

9. The substrate support of claim 1, wherein the gear is a bevel gear.

10. The substrate support of claim 1, wherein the coupling assembly further includes a pinion arranged to interface with the gear, and wherein rotation of the pinion is translated to rotation of the gear.

11. The substrate support of claim 10, wherein the pinion rotates on an axis perpendicular to an axis of the gear.

16. The substrate support of claim 1, wherein the gear is a bevel gear.

12. A substrate support, comprising:

a conductive baseplate arranged to support a ceramic layer, the conductive baseplate including a first cavity extending along an axis perpendicular to a horizontal plane defined by the conductive baseplate;

an insulative baseplate arranged between the conductive baseplate and a lower wall of a substrate processing chamber, the insulative baseplate including a second cavity; and

a coupling assembly arranged within the first cavity of the conductive baseplate, the coupling assembly comprising

a gear configured to rotate about the axis, and

a pin arranged within the first cavity, the pin extending along the axis through the gear and into the second cavity of the insulative baseplate, wherein rotation of the gear causes the pin to move upward or downward relative to the conductive baseplate, and wherein the pin is retained within the second cavity when the gear is rotated to cause the pin to move downward into the second cavity.

13. The substrate support of claim 12, wherein the second cavity includes a nut, and wherein the pin is retained within the nut in the second cavity.

14. The substrate support of claim 12, wherein rotation of the gear causes rotation of the pin.

15. The substrate support of claim 12, wherein at least one of an outer surface of the pin, an inner surface of the gear, and an inner surface of the first cavity is threaded.

17. The substrate support of claim 12, wherein the coupling assembly further includes a pinion arranged to interface with the gear, and wherein rotation of the pinion is translated to rotation of the gear.

18. The substrate support of claim 17, wherein the pinion rotates on an axis perpendicular to an axis of the gear.