MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME
First Claim
Patent Images
1. A microphone, comprising:
- a substrate;
an opening in the substrate;
a support structure in the opening and comprising a first bracket formed in a closed-loop pattern and a second bracket connecting the first bracket to a periphery of the opening.
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Abstract
A microphone includes a substrate, an opening in the substrate, and a support structure in the opening. The support structure includes a first bracket formed in a closed-loop pattern and a second bracket connecting the first bracket to a periphery of the opening. The support structure in the opening increases the mechanical reliability of the microphone.
22 Citations
20 Claims
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1. A microphone, comprising:
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a substrate; an opening in the substrate; a support structure in the opening and comprising a first bracket formed in a closed-loop pattern and a second bracket connecting the first bracket to a periphery of the opening. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for manufacturing a microphone, comprising:
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providing a substrate having a top surface and a bottom surface; forming a patterned mask on the bottom surface of the substrate, the patterned mask defining a shape of an opening; etching the substrate using the patterned mask as a mask to form the opening, the opening comprising a support structure having a first bracket formed in a closed-loop pattern and a second bracket connecting the first bracket to a periphery of the opening. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification