Active Mechanical-Environmental-Thermal MEMS Device for Nanoscale Characterization
First Claim
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1. A MEMS device for nanoscale characterization, comprising:
- a sealed environmental chamber comprising a sample holder for physical control of a sample and a membrane window for transmitting radiation into the sealed environmental chamber for characterization of the sample; and
a moveable piston attached to the sample holder for applying a mechanical force to the sample, wherein the piston can be moved by an actuator external to the sealed environmental chamber.
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Abstract
A microelectromechanical system (MEMS) device can be used for quantitative mechanical testing of materials within a controlled (chemical and temperature) environment, with the ability for electrochemical control to the specimen, that is coupled with a complimentary in-situ characterization technique.
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9 Claims
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1. A MEMS device for nanoscale characterization, comprising:
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a sealed environmental chamber comprising a sample holder for physical control of a sample and a membrane window for transmitting radiation into the sealed environmental chamber for characterization of the sample; and a moveable piston attached to the sample holder for applying a mechanical force to the sample, wherein the piston can be moved by an actuator external to the sealed environmental chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification