PLASMA REACTOR WITH ELECTRON BEAM OF SECONDARY ELECTRONS

• US 20180277340A1
• Filed: 04/09/2018
• Published: 09/27/2018
• Est. Priority Date: 03/24/2017
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Yang, Yang, Ramaswamy, Kartik, Collins, Kenneth S., Lane, Steven, Monroy, Gonzalo Antonio, Chen, Lucy, Guo, Yue, Venkatasubramanian, Eswaranand
• Application Number:
  US15/948,949
• Publication Number:
  US 20180277340A1
• Time in Patent Office: Days
• CPC Class Codes: C23C 16/26 Deposition of carbon only
• CPC Class Codes: C23C 16/5096 Flat-bed apparatus
• CPC Class Codes: H01J 2237/332 Coating
• CPC Class Codes: H01J 2237/334 Etching
• CPC Class Codes: H01J 37/32183 Matching circuits
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32568 Relative arrangement or disposition of electrodes; moving means
• CPC Class Codes: H01J 37/32669 Particular magnets or magnet arrangements for controlling the discharge
• CPC Class Codes: H01J 37/32715 Workpiece holder
• CPC Class Codes: H01L 21/02115 the material being carbon, e.g. alpha-C, diamond or hydrogen doped carbon
• CPC Class Codes: H01L 21/02274 in the presence of a plasma [PECVD]
• CPC Class Codes: H01L 21/0234 treatment by exposure to a plasma
• CPC Class Codes: H01L 21/02351 treatment by exposure to corpuscular radiation, e.g. exposure to electrons, alpha-particles, protons or ions

Abstract

An electron beam plasma reactor includes a plasma chamber having a side wall, an upper electrode, a workpiece support to hold a workpiece facing the upper electrode with the workpiece on the support having a clear view of the upper electrode, a first RF power source coupled to said upper electrode, a gas supply, a vacuum pump coupled to the chamber to evacuate the chamber, and a controller. The controller is configured to operate the first RF power source to apply an RF power to upper electrode, and to operate the gas distributor and vacuum pump, so as to create a plasma in an upper portion of the chamber that generates an electron beam from the upper electrode toward the workpiece and a lower electron-temperature plasma in a lower portion of the chamber including the workpiece.

Claims

1. An electron beam plasma reactor comprising:

a plasma chamber having a side wall;

an upper electrode;

a workpiece support to hold a workpiece facing the upper electrode, wherein the workpiece on the support has a clear view of the upper electrode;

a first RF power source coupled to said upper electrode;

a gas supply;

a vacuum pump coupled to the chamber to evacuate the chamber;

a controller configured to operate the first RF power source to apply an RF power to upper electrode, and to operate the gas distributor and vacuum pump, so as to create a plasma in an upper portion of the chamber that generates an electron beam from the upper electrode toward the workpiece and a lower electron-temperature plasma in a lower portion of the chamber including the workpiece.

2. The reactor of claim 1, wherein the controller is configured to operate the first RF power source such that the at least a portion of the electron beam emitted from upper electrode produces the low electron-temperature plasma.

3. The reactor of claim 1, comprising a bias voltage generator coupled to the workpiece support.

4. The reactor of claim 1, wherein said top electrode comprises one of silicon, carbon, silicon carbide, silicon oxide, aluminum oxide, yttrium oxide, or zirconium oxide.

5. The reactor of claim 1, comprising a first electromagnet or permanent magnet adjacent and surrounding the upper portion of the chamber and a second electromagnet or permanent magnet adjacent and surrounding the lower portion of the chamber.

6. The reactor of claim 1, comprising a window in the side wall in the upper portion of the chamber, a coil antenna around the window, and an RF generator coupled to the coil antenna.

7. The reactor of claim 1, wherein the gas supply is configured to supply an inert gas to the chamber.

8. The reactor of claim 1, wherein the gas supply is configured to supply a process gas to the chamber.

9. The reactor of claim 1, wherein a distance between the upper electrode and the workpiece support is sufficiently large to establish a temperature gradient in the plasma vertically through the chamber.

10. The reactor of claim 1, wherein the lower electron-temperature plasma in the lower portion of the chamber has an electron-temperature at or lower than an electron-temperature to deposit or anneal a layer of diamond-like carbon.

11. A method of processing a workpiece in a plasma reactor, comprising:

supporting a workpiece in a chamber of the plasma reactor such that the workpiece faces an upper electrode and has a clear view of an upper electrode;

introducing a gas into the chamber; and

applying a first RF power to the upper electrode so as to create a plasma in an upper portion of the chamber such that ions of the plasma impact the upper electrode and generate an electron beam of secondary electrons from the upper electrode toward the workpiece, wherein a first portion of the electron beam impinges the workpiece.

12. The method of claim 11, wherein a second portion of the electron beam generate a lower electron-temperature plasma in a lower portion of the chamber including the workpiece.

13. The method of claim 11, wherein introducing the gas establishes a pressure of 10 to 200 mTorr in the chamber.

14. The method of claim 11, wherein the gas is an inert gas.

15. The method of claim 11, wherein the gas is a process gas.

16. The method of claim 11, comprising applying a bias voltage to the workpiece support.

17. The method of claim 11, wherein said top electrode comprises one of silicon, carbon, silicon carbide, silicon oxide, aluminum oxide, yttrium oxide, or zirconium oxide.

18. The method of claim 11, comprising applying a first magnetic field from a first electromagnet or permanent magnet adjacent to the upper portion of the chamber and applying a second magnetic field from a second electromagnet or permanent magnet to the lower portion of the chamber.