METHOD OF TESTING AN OBJECT AND APPARATUS FOR PERFORMING THE SAME
First Claim
1. An apparatus for testing an object, the apparatus comprising:
- a moving unit configured to hold and move the object;
a transmissive illuminating unit including a light source generating light and a transmissive mask pattern, the transmissive mask pattern including a first region configured to convert the light generated from the light source into a slit light, and a second region arranged in a movement direction of the object with respect to the first region to partially transmit the light generated from the light source, wherein the transmissive illuminating unit is configured to project a measuring light, which is provided by transmitting the light generated from the light source through the transmissive mask pattern, to the object; and
a detecting unit configured to receive a reflected light of the measuring light from the object and to detect a height and surface state of the object based on the reflected light.
1 Assignment
0 Petitions
Accused Products
Abstract
An apparatus for testing an object includes a moving unit configured to hold and move the object. A transmissive illuminating unit includes a light source generating light and a transmissive mask pattern. The transmissive mask pattern includes a first region configured to convert the light generated from the light source into a slit light, and a second region arranged in a movement direction of the object with respect to the first region to partially transmit the light generated from the light source. The transmissive illuminating unit is configured to project a measuring light, which is provided by transmitting the light generated from the light source through the transmissive mask pattern, to the object. A detecting unit is configured to receive a reflected light of the measuring light from the object and to detect a height and surface state of the object based on the reflected light.
-
Citations
20 Claims
-
1. An apparatus for testing an object, the apparatus comprising:
-
a moving unit configured to hold and move the object; a transmissive illuminating unit including a light source generating light and a transmissive mask pattern, the transmissive mask pattern including a first region configured to convert the light generated from the light source into a slit light, and a second region arranged in a movement direction of the object with respect to the first region to partially transmit the light generated from the light source, wherein the transmissive illuminating unit is configured to project a measuring light, which is provided by transmitting the light generated from the light source through the transmissive mask pattern, to the object; and a detecting unit configured to receive a reflected light of the measuring light from the object and to detect a height and surface state of the object based on the reflected light. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A method of testing an object, the method using a moving unit, a transmissive illuminating unit, and a detecting unit, wherein the moving unit is configured to hold and move the object, the transmissive illuminating unit includes a light source generating light and a transmissive mask pattern, the transmissive mask pattern having a first region configured to convert the light generated from the light source into a slit light, and a second region arranged in a movement direction of the object with respect to the first region to partially transmit the light generated from the light source, wherein the transmissive illuminating unit is configured to project a measuring light, which is provided by transmitting the light generated from the light source through the transmissive mask pattern, to the object, the method comprising:
-
acquiring a reflected light of the measuring light from the object using the detecting unit; and detecting a height and surface state of the object based on the reflected light acquired by the detecting unit. - View Dependent Claims (8, 9, 10, 11, 12)
-
-
13. An apparatus for testing semiconductor chips, comprising:
-
a stage configured to hold the semiconductor chips and to move in a movement direction; a light source configured to generate light of a first brightness, to generate light of a second brightness different from the first brightness, and to cast the light of the first and second brightness onto the semiconductor chips as they are moved by the stage; a first light detecting unit configured to receive the light of the first brightness that is reflected off of the semiconductor chips and to determine a mounted height therefrom; and a second light detecting unit configured to receive the light of the second brightness that is reflected off of the semiconductor chips and to detect particles present on the semiconductor chips therefrom. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
-
Specification