Please download the dossier by clicking on the dossier button x
×

METHOD OF TESTING AN OBJECT AND APPARATUS FOR PERFORMING THE SAME

  • US 20180284032A1
  • Filed: 03/28/2018
  • Published: 10/04/2018
  • Est. Priority Date: 04/03/2017
  • Status: Active Grant
First Claim
Patent Images

1. An apparatus for testing an object, the apparatus comprising:

  • a moving unit configured to hold and move the object;

    a transmissive illuminating unit including a light source generating light and a transmissive mask pattern, the transmissive mask pattern including a first region configured to convert the light generated from the light source into a slit light, and a second region arranged in a movement direction of the object with respect to the first region to partially transmit the light generated from the light source, wherein the transmissive illuminating unit is configured to project a measuring light, which is provided by transmitting the light generated from the light source through the transmissive mask pattern, to the object; and

    a detecting unit configured to receive a reflected light of the measuring light from the object and to detect a height and surface state of the object based on the reflected light.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×