HIGH VOLTAGE RESISTIVE OUTPUT STAGE CIRCUIT
First Claim
1. A high voltage, high frequency switching circuit comprising:
- a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz;
an output; and
a resistive output stage electrically coupled to, and in parallel with the output of the high voltage switching power supply, the resistive output stage comprising at least one resistor that discharges a load coupled with the output, the resistive output stage configured to dissipate over about 1 kilowatt of average power, wherein the resistor in the resistive output stage includes a resistance R and the output is coupled with a load having a capacitance C such that R≈
C/tf where tf is the pulse fall time.
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Accused Products
Abstract
Some embodiments include a high voltage, high frequency switching circuit. The switching circuit may include a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz and an output. The switching circuit may also include a resistive output stage electrically coupled in parallel with the output and between the output stage and the high voltage switching power supply, the resistive output stage comprising at least one resistor that discharges a load coupled with the output. In some embodiments, the resistive output stage may be configured to discharge over about 1 kilowatt of average power during each pulse cycle. In some embodiments, the output can produce a high voltage pulse having a voltage greater than 1 kV and with frequencies greater than 10 kHz with a pulse fall time less than about 400 ns.
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Citations
28 Claims
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1. A high voltage, high frequency switching circuit comprising:
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a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz; an output; and a resistive output stage electrically coupled to, and in parallel with the output of the high voltage switching power supply, the resistive output stage comprising at least one resistor that discharges a load coupled with the output, the resistive output stage configured to dissipate over about 1 kilowatt of average power, wherein the resistor in the resistive output stage includes a resistance R and the output is coupled with a load having a capacitance C such that R≈
C/tf where tf is the pulse fall time. - View Dependent Claims (2, 3, 4, 5, 6, 9, 11)
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7. (canceled)
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8. A high voltage, high frequency switching circuit comprising:
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a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz; an output; and a resistive output stage electrically coupled to, and in parallel with the output of the high voltage switching power supply, the resistive output stage comprising at least one resistor that discharges a load coupled with the output, the resistive output stage configured to dissipate over about 1 kilowatt of average power, wherein the load is capacitive in nature with a capacitance less than 50 nF, wherein the load capacitance does not hold charges for times greater than 10 μ
s.
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10. A high voltage, high frequency switching circuit comprising:
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a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz; an output; and a resistive output stage electrically coupled to, and in parallel with the output of the high voltage switching power supply, the resistive output stage comprising at least one resistor that discharges a load coupled with the output, the resistive output stage configured to dissipate over about 1 kilowatt of average power, wherein the output produces a negative bias voltage within a plasma of greater than −
2 kV when the high voltage switching power supply is not providing a high voltage pulse.
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12. A high voltage, high frequency switching circuit comprising:
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a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz; an output; and a resistive output stage electrically coupled to, and in parallel with the output of the high voltage switching power supply, the resistive output stage comprising at least one resistor that discharges a load coupled with the output, wherein the output can produce a high voltage pulse having a voltage greater than 1 kV and with frequencies greater than 10 kHz and with a pulse fall time less than about 400 ns, wherein the resistor in the resistive output stage includes a resistance R and the output is coupled with a load having a capacitance C such that R≈
C/tf where tf is the pulse fall time. - View Dependent Claims (13, 14, 15, 16, 17, 19, 20)
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18. (canceled)
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21. A high voltage, high frequency switching circuit comprising:
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a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz; an output; and a resistive output stage electrically coupled to, and in parallel with the output of the high voltage switching power supply, the resistive output stage comprising at least one resistor, wherein the output can produce a high voltage pulse having a voltage greater than 1 kV with frequencies greater than 10 kHz and with pulse fall times less than about 400 ns, and wherein the output is electrically coupled to a plasma type load, wherein the plasma type load can be modeled as having capacitive elements less than 20 nF in size. - View Dependent Claims (23, 24, 25, 26, 27, 28)
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22. (canceled)
Specification