METHOD OF CONTROLLING DISPLAY OF OPERATION OF SEMICONDUCTOR MANUFACTURING APPARATUS AND NON-TRANSITORY COMPUTER READABLE STORAGE MEDIUM THEREFOR, AND SYSTEM FOR PERFORMING DISPLAY CONCERNING OPERATION OF SEMICONDUCTOR MANUFACTURING APPARATUS
First Claim
1. A method of controlling a display concerning a semiconductor manufacturing apparatus, the method comprising:
- repeatedly acquiring a state of one or more devices included in the semiconductor manufacturing apparatus;
providing a first animation which indicates an operation of the semiconductor manufacturing apparatus by displaying at least an image indicating the state of one or more devices on a display unit each time the state is acquired;
storing, in a memory, the acquired state of one or more devices and a time related to the state;
receiving an input for switching a display mode; and
providing a second animation which indicates an operation of the semiconductor manufacturing apparatus by displaying, on the display unit, at least one or more images one by one after receiving the input for switching a display mode, the one or more images respectively indicating the state of one or more devices, which are stored in the memory, related to one or more times including a reference time.
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Accused Products
Abstract
A method is provided, the method including: repeatedly acquiring a state of one or more devices included in the semiconductor manufacturing apparatus; providing a first animation indicating an operation of the semiconductor manufacturing apparatus by displaying at least an image indicating the state of one or more devices on a display unit each time the state is acquired; storing, in a memory, the acquired state of one or more devices and a time related to the state; receiving an input for switching a display mode; and providing a second animation of the semiconductor manufacturing apparatus by displaying, one by one on the display unit, at least one or more images respectively indicating the state of one or more devices related to one or more times including a reference time stored in the memory, after receiving the input for switching a display mode.
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Citations
9 Claims
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1. A method of controlling a display concerning a semiconductor manufacturing apparatus, the method comprising:
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repeatedly acquiring a state of one or more devices included in the semiconductor manufacturing apparatus; providing a first animation which indicates an operation of the semiconductor manufacturing apparatus by displaying at least an image indicating the state of one or more devices on a display unit each time the state is acquired; storing, in a memory, the acquired state of one or more devices and a time related to the state; receiving an input for switching a display mode; and providing a second animation which indicates an operation of the semiconductor manufacturing apparatus by displaying, on the display unit, at least one or more images one by one after receiving the input for switching a display mode, the one or more images respectively indicating the state of one or more devices, which are stored in the memory, related to one or more times including a reference time. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A system of performing a display concerning a semiconductor manufacturing apparatus, the system comprising:
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a first computer configured to repeatedly acquire a state of one or more devices included in the semiconductor manufacturing apparatus; a second computer configured to store the acquired state of one or more devices and a time related to the state; and a third computer configured to provide an animation which indicates an operation of the semiconductor manufacturing apparatus, wherein the third computer being configured to; provide a first animation which indicates an operation of the semiconductor manufacturing apparatus by displaying at least an image indicating the state of one or more devices each time the state is acquired if a display mode is set to a first mode, and provide a second animation which indicates an operation of the semiconductor manufacturing apparatus by displaying, on the display unit, at least one or more images one by one if the display mode is set to a second mode, the one or more images respectively indicating the state of one or more devices, which is stored in the second computer, related to one or more times including a reference time; and fourth computer configured to receiving an input for switching the display mode at least between the first mode and the second mode. - View Dependent Claims (9)
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Specification