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VACUUM SUCTION PAD AND SUBSTRATE HOLDER

  • US 20180286772A1
  • Filed: 03/29/2018
  • Published: 10/04/2018
  • Est. Priority Date: 03/31/2017
  • Status: Active Grant
First Claim
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1. A vacuum suction pad comprising:

  • a pad main body having a lower surface adhered to a stage of a substrate holder; and

    a plurality of circular arc-shaped substrate holding convexities, provided on a top surface of the pad main body, for holding a substrate which is attracted by vacuum suction to the top surface of the pad main body, whereinthe circular arc-shaped substrate holding convexities are arranged concentrically with the pad main body having a circular shape, anda width, in a radial direction, of the substrate holding convexity located on a radially outer side among the plurality of circular arc-shaped substrate holding convexities is narrower than a width, in the radial direction, of the substrate holding convexity located on a radially inner side.

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