VACUUM SUCTION PAD AND SUBSTRATE HOLDER
First Claim
1. A vacuum suction pad comprising:
- a pad main body having a lower surface adhered to a stage of a substrate holder; and
a plurality of circular arc-shaped substrate holding convexities, provided on a top surface of the pad main body, for holding a substrate which is attracted by vacuum suction to the top surface of the pad main body, whereinthe circular arc-shaped substrate holding convexities are arranged concentrically with the pad main body having a circular shape, anda width, in a radial direction, of the substrate holding convexity located on a radially outer side among the plurality of circular arc-shaped substrate holding convexities is narrower than a width, in the radial direction, of the substrate holding convexity located on a radially inner side.
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Accused Products
Abstract
A vacuum suction pad capable of making it more difficult to separate a substrate when the substrate is held by vacuum suction, the vacuum suction pad 8 including: a pad main body 37 having a lower surface adhered to a stage 5 of a substrate holder 2; and a plurality of circular arc-shaped substrate holding convexities 38, provided on a top surface of the pad main body 37, for holding a substrate W attracted by vacuum suction to the top surface of the pad main body 37, wherein the substrate holding convexities 38 are arranged concentrically with the circular pad main body 37, and width W1 in a radial direction of the substrate holding convexity 38 located on a radially outer side among the plurality of substrate holding convexities 38 is narrower than width W2 in the radial direction of the substrate holding convexity 38 on a radially inner side.
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Citations
13 Claims
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1. A vacuum suction pad comprising:
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a pad main body having a lower surface adhered to a stage of a substrate holder; and a plurality of circular arc-shaped substrate holding convexities, provided on a top surface of the pad main body, for holding a substrate which is attracted by vacuum suction to the top surface of the pad main body, wherein the circular arc-shaped substrate holding convexities are arranged concentrically with the pad main body having a circular shape, and a width, in a radial direction, of the substrate holding convexity located on a radially outer side among the plurality of circular arc-shaped substrate holding convexities is narrower than a width, in the radial direction, of the substrate holding convexity located on a radially inner side. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A vacuum suction pad comprising:
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a pad main body having a lower surface adhered to a stage of a substrate holder; a plurality of circular arc-shaped substrate holding convexities, provided on a top surface of the pad main body, for holding a substrate which is attracted by vacuum suction to the top surface of the pad main body; and an area forming convexity, provided on the top surface of the pad main body, for dividing the top surface of the pad main body into a plurality of vacuum suction areas in the radial direction, wherein the circular arc-shaped substrate holding convexities are arranged concentrically with the pad main body having a circular shape, and wherein the vacuum suction area on the radially outer side is provided with a first intake/exhaust port, and the vacuum suction area on the radially inner side is provided with a second intake/exhaust port. - View Dependent Claims (10, 11)
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12. A substrate holder comprising:
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a stage for holding a substrate; and a vacuum suction pad adhered to the stage, wherein the vacuum suction pad includes; a pad main body having a lower surface adhered to the stage; and a plurality of circular arc-shaped substrate holding convexities, provided on a top surface of the pad main body, for holding a substrate which is attracted by vacuum suction to the top surface of the pad main body, wherein the circular arc-shaped substrate holding convexities are arranged concentrically with the pad main body having a circular shape, and a width, in a radial direction, of the substrate holding convexity located on a radially outer side among the plurality of circular arc-shaped substrate holding convexities is narrower than a width, in the radial direction, of the substrate holding convexity located on a radially inner side. - View Dependent Claims (13)
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Specification