VACUUM SUCTION PAD AND SUBSTRATE HOLDER

• US 20180286772A1
• Filed: 03/29/2018
• Published: 10/04/2018
• Est. Priority Date: 03/31/2017
• Status: Active Grant

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation
• Inventors: YAMAMOTO, Satoru, NAKANISHI, Masayuki, KODERA, Kenji
• Granted Patent: US 10,639,727 B2
• Time in Patent Office: Days
• CPC Class Codes: B23B 31/307 Vacuum chucks
• CPC Class Codes: B24B 37/30 for single side lapping of plane surfaces
• CPC Class Codes: B24B 41/068 Table-like supports for panels, sheets or the like
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices
• CPC Class Codes: Y10T 279/11 Vacuum

Abstract

A vacuum suction pad capable of making it more difficult to separate a substrate when the substrate is held by vacuum suction, the vacuum suction pad 8 including: a pad main body 37 having a lower surface adhered to a stage 5 of a substrate holder 2; and a plurality of circular arc-shaped substrate holding convexities 38, provided on a top surface of the pad main body 37, for holding a substrate W attracted by vacuum suction to the top surface of the pad main body 37, wherein the substrate holding convexities 38 are arranged concentrically with the circular pad main body 37, and width W1 in a radial direction of the substrate holding convexity 38 located on a radially outer side among the plurality of substrate holding convexities 38 is narrower than width W2 in the radial direction of the substrate holding convexity 38 on a radially inner side.

Claims

1. A vacuum suction pad comprising:

a pad main body having a lower surface adhered to a stage of a substrate holder; and

a plurality of circular arc-shaped substrate holding convexities, provided on a top surface of the pad main body, for holding a substrate which is attracted by vacuum suction to the top surface of the pad main body, wherein

the circular arc-shaped substrate holding convexities are arranged concentrically with the pad main body having a circular shape, and

a width, in a radial direction, of the substrate holding convexity located on a radially outer side among the plurality of circular arc-shaped substrate holding convexities is narrower than a width, in the radial direction, of the substrate holding convexity located on a radially inner side.

2. The vacuum suction pad according to claim 1, wherein a coating layer having substrate releasability is formed on the top surface of the pad main body.

3. The vacuum suction pad according to claim 1, further comprising an area forming convexity, provided on the top surface of the pad main body, for dividing the top surface of the pad main body into a plurality of vacuum suction areas in the radial direction, wherein

the vacuum suction area on the radially outer side is provided with a first intake/exhaust port, and

the vacuum suction area on the radially inner side is provided with a second intake/exhaust port.

4. The vacuum suction pad according to claim 1, wherein

the substrate holding convexities include a contact portion that comes into contact with the substrate, and a root portion that supports the contact portion, and

a width, in the radial direction, of the contact portion is set wider than a width, in the radial direction, of the root portion.

5. The vacuum suction pad according to claim 1, wherein

the substrate holding convexities include a contact portion that comes into contact with the substrate, and a root portion that supports the contact portion, and

a width, in the radial direction, of the contact portion is set narrower than a width, in the radial direction, of the root portion.

6. The vacuum suction pad according to claim 1, wherein the substrate holding convexity has a circular cross-sectional shape.

7. The vacuum suction pad according to claim 1, wherein the width, in the radial direction, of each of the substrate holding convexities located on the radially inner side is approximately the same.

8. The vacuum suction pad according to claim 1, wherein the width, in a radial direction, of the substrate holding convexity located on the radially most outer side is narrower than the width, in the radial direction, of the other substrate holding convexity.

9. A vacuum suction pad comprising:

a pad main body having a lower surface adhered to a stage of a substrate holder;

a plurality of circular arc-shaped substrate holding convexities, provided on a top surface of the pad main body, for holding a substrate which is attracted by vacuum suction to the top surface of the pad main body; and

an area forming convexity, provided on the top surface of the pad main body, for dividing the top surface of the pad main body into a plurality of vacuum suction areas in the radial direction,

wherein the circular arc-shaped substrate holding convexities are arranged concentrically with the pad main body having a circular shape, and

wherein

the vacuum suction area on the radially outer side is provided with a first intake/exhaust port, and

the vacuum suction area on the radially inner side is provided with a second intake/exhaust port.

10. The vacuum suction pad according to claim 9, wherein the area forming convexity is provided into the radially outer side of the pad main body.

11. The vacuum suction pad according to claim 9, wherein the width, in the radial direction, of each of the circular arc-shaped substrate holding convexities is approximately the same.

12. A substrate holder comprising:

a stage for holding a substrate; and

a vacuum suction pad adhered to the stage, wherein

the vacuum suction pad includes;

a pad main body having a lower surface adhered to the stage; and

a plurality of circular arc-shaped substrate holding convexities, provided on a top surface of the pad main body, for holding a substrate which is attracted by vacuum suction to the top surface of the pad main body, wherein

the circular arc-shaped substrate holding convexities are arranged concentrically with the pad main body having a circular shape, and

a width, in a radial direction, of the substrate holding convexity located on a radially outer side among the plurality of circular arc-shaped substrate holding convexities is narrower than a width, in the radial direction, of the substrate holding convexity located on a radially inner side.

13. The substrate holder according to claim 12, further comprising a first intake/exhaust line and a second intake/exhaust line, and

wherein the vacuum suction pad further including:

an area forming convexity, provided on the top surface of the pad main body, for dividing the top surface of the pad main body into a plurality of vacuum suction areas in the radial direction, and

wherein

the vacuum suction area on the radially outer side is provided with a first intake/exhaust port to be connected to the first intake/exhaust line of the substrate holder, and

the vacuum suction area on the radially inner side is provided with a second intake/exhaust port to be connected to the second intake/exhaust line of the substrate holder.