Method And Apparatus For Deposition Of Low-K Films
First Claim
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1. A method of depositing a film, the method comprising:
- providing a substrate having a substrate surface with a plurality of features formed therein, each feature extending a distance from the substrate surface and having a bottom and at least one sidewall;
forming a conformal film on the substrate surface; and
exposing the conformal film to a steam anneal to form an annealed conformal film with an increased oxygen content.
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Abstract
Methods and apparatus for forming a conformal SiOC film on a surface are described. A SiCN film is formed on a substrate surface and exposed to a steam annealing process to decrease the nitrogen content, increase the oxygen content and leave the carbon content about the same. The annealed film has one or more of the wet etch rate or dielectric constant of the film.
2 Citations
20 Claims
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1. A method of depositing a film, the method comprising:
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providing a substrate having a substrate surface with a plurality of features formed therein, each feature extending a distance from the substrate surface and having a bottom and at least one sidewall; forming a conformal film on the substrate surface; and exposing the conformal film to a steam anneal to form an annealed conformal film with an increased oxygen content. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of depositing a film, the method comprising:
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providing a substrate having a substrate surface with a plurality of features formed therein, each feature extending a distance from the substrate surface and having a bottom and at least one sidewall; forming a conformal film on the substrate surface in an atomic layer deposition chamber by sequentially exposing the substrate to a silicon precursor comprising bis(trichlorosilyl)methane and a reactant comprising ammonia, the conformal film having an initial carbon content, an initial oxygen content and an initial nitrogen content; moving the substrate from the atomic layer deposition chamber to an annealing chamber; and exposing the conformal film to a steam anneal at a temperature in the range of about 300°
C. to about 500°
C. and a partial pressure of water of about 585 Torr to form an annealed conformal film with a thickness in the range of about 100 Å
to about 140 Å
, the annealed conformal film having an annealed carbon content, an annealed oxygen content and an annealed nitrogen content, the annealed nitrogen content lower than the initial nitrogen content, the annealed oxygen content greater than the initial oxygen content and the annealed carbon content within ±
10% of the initial carbon content, the annealed conformal film having a wet etch rate in dilute HF less than about 20 Å
/min for the first minute, a leakage current less than or equal to about 1.5×
10−
7 Å
/cm2, and a dielectric constant less than 5.
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20. A processing platform comprising:
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a central transfer station comprising a plurality of sides and a robot positioned therein; a batch processing chamber connected to a side of the central transfer station; a steam annealing chamber connected to a side of the central transfer station; and a controller coupled to the central transfer station, the batch processing chamber and the steam annealing chamber, the controller having one or more configurations selected from a first configuration to move a substrate to the batch processing chamber, a second configuration to provide a plurality of process gases to the batch processing chamber to deposit a film on the substrate in the batch processing chamber, a third configuration to move a substrate from the batch processing chamber to the steam annealing chamber, a fourth configuration to heat the steam annealing chamber to an annealing temperature, a fifth configuration to provide a flow of water vapor to the steam annealing chamber, or a sixth configuration to remove the substrate from the steam annealing chamber.
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Specification