METHOD OF SELECTIVE VERTICAL GROWTH OF A DIELECTRIC MATERIAL ON A DIELECTRIC SUBSTRATE
First Claim
1. A substrate processing method, comprising:
- providing a planarized substrate containing a first material having a recessed feature that is filled with a second material;
selectively depositing a graphene layer on the second material relative to the first material;
selectively depositing a SiO2 film on the first material relative to the graphene layer; and
removing the graphene layer from the substrate.
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Accused Products
Abstract
Embodiments of the invention describe methods for selective vertical growth of dielectric material on a dielectric substrate. According to one embodiment, the method includes providing a planarized substrate containing a first material having a recessed feature that is filled with a second material, selectively depositing a graphene layer on the second material relative to the first material, selectively depositing a SiO2 film on the first material relative to the graphene layer, and removing the graphene layer from the substrate. According to one embodiment, the first material includes a dielectric material and the second material includes a metal layer.
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Citations
20 Claims
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1. A substrate processing method, comprising:
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providing a planarized substrate containing a first material having a recessed feature that is filled with a second material; selectively depositing a graphene layer on the second material relative to the first material; selectively depositing a SiO2 film on the first material relative to the graphene layer; and removing the graphene layer from the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification