SiC Semiconductor Device with Offset in Trench Bottom
First Claim
1. A semiconductor device, comprising:
- a trench extending from a first surface into a SiC semiconductor body, the trench having a first sidewall, a second sidewall opposite to the first sidewall, and a trench bottom;
a gate electrode arranged in the trench and electrically insulated from the SiC semiconductor body by a gate dielectric;
a body region of a first conductivity type adjoining the first sidewall; and
a shielding structure of the first conductivity type adjoining at least a portion of the second sidewall and the trench bottom,wherein along a vertical direction extending from the first surface to a second surface of the SiC semiconductor body opposite to the first surface, a first section of the trench bottom and a second section of the trench bottom are offset to one another by a vertical offset.
1 Assignment
0 Petitions
Accused Products
Abstract
A semiconductor device includes a trench extending from a first surface into a SiC semiconductor body. The trench has a first sidewall, a second sidewall opposite to the first sidewall, and a trench bottom. A gate electrode is arranged in the trench and is electrically insulated from the SiC semiconductor body by a trench dielectric. A body region of a first conductivity type adjoins the first sidewall. A shielding structure of the first conductivity type adjoins at least a portion of the second sidewall and the trench bottom. A first section of the trench bottom and a second section of the trench bottom are offset to one another by a vertical offset along a vertical direction extending from the first surface to a second surface of the SiC semiconductor body opposite to the first surface.
-
Citations
21 Claims
-
1. A semiconductor device, comprising:
-
a trench extending from a first surface into a SiC semiconductor body, the trench having a first sidewall, a second sidewall opposite to the first sidewall, and a trench bottom; a gate electrode arranged in the trench and electrically insulated from the SiC semiconductor body by a gate dielectric; a body region of a first conductivity type adjoining the first sidewall; and a shielding structure of the first conductivity type adjoining at least a portion of the second sidewall and the trench bottom, wherein along a vertical direction extending from the first surface to a second surface of the SiC semiconductor body opposite to the first surface, a first section of the trench bottom and a second section of the trench bottom are offset to one another by a vertical offset. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
-
15. A method of manufacturing a semiconductor device, the method comprising:
-
forming a first trench extending from a first surface into a SiC semiconductor body; forming a shielding structure of a first conductivity type in the SiC semiconductor body by introducing dopants of a first conductivity type through a bottom of the first trench into the SiC semiconductor body; and forming a second trench extending from the first surface into the SiC semiconductor body, wherein the second trench extends deeper into the SiC semiconductor body than the first trench, wherein the first trench and the second trench laterally merge one another so as to set a second section of a trench bottom of the second trench deeper in the SiC semiconductor body than a first section of the trench bottom of the second trench. - View Dependent Claims (16, 17, 18, 19, 20, 21)
-
Specification