METHOD OF INSPECTING A SPECIMEN AND SYSTEM THEREOF
First Claim
1. A die layout clipping unit, the unit comprising:
- an I/O interface configured to receive, from at least one computer-based and online connected inspection unit, a first data indicative of location information of a potential defect of interest revealed in a specimen and of one or more inspected layers corresponding to the potential defect of interest; and
a processor operatively connected to the I/O interface and configured to generate a die layout clip in accordance with the first data, the die layout clip comprising information indicative of one or more patterns characterizing an inspection area,wherein the I/O interface is further configured to transmit the generated die layout clip to the at least one inspection unit.
1 Assignment
0 Petitions
Accused Products
Abstract
There is provided an inspection system for inspecting a specimen, an inspection unit capable to operate in conjunction with an inspection machine unit, a die layout clipping unit, methods of inspecting a specimen, and a method of providing a die layout clip. The method of inspecting a specimen comprises: obtaining location information indicative of coordinates of a potential defect of interest revealed in the specimen and of one or more inspected layers corresponding to the potential defect of interest; sending to a die layout clipping unit a first data indicative of the location information and dimensions of an inspection area containing the potential defect of interest; receiving a die layout clip generated in accordance with the first data; specifying at least one inspection algorithm of the inspection area using information comprised in the die layout clip; and enabling inspection of the inspection area using the specified inspection algorithm.
4 Citations
18 Claims
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1. A die layout clipping unit, the unit comprising:
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an I/O interface configured to receive, from at least one computer-based and online connected inspection unit, a first data indicative of location information of a potential defect of interest revealed in a specimen and of one or more inspected layers corresponding to the potential defect of interest; and a processor operatively connected to the I/O interface and configured to generate a die layout clip in accordance with the first data, the die layout clip comprising information indicative of one or more patterns characterizing an inspection area, wherein the I/O interface is further configured to transmit the generated die layout clip to the at least one inspection unit. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A computer-implemented method of providing a die layout clip, the method comprising:
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receiving, by a computer-based die layout clipping unit, from at least one computer-based and online connected inspection unit, a first data indicative of location information of a potential defect of interest revealed in a specimen and of one or more inspected layers corresponding to the potential defect of interest; generating, by the die layout clipping unit, the die layout clip in accordance with the first data, the die layout clip comprising information indicative of one or more patterns characterizing an inspection area; and transmitting, by the die layout clipping unit, the generated die layout clip to the at least one inspection unit. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A non-transitory computer readable storage medium including instructions that, when executed by a processor, cause the processor to perform operations for providing a die layout clip, the operations comprising:
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receiving from at least one computer-based and online connected inspection unit, a first data indicative of location information of a potential defect of interest revealed in a specimen and of one or more inspected layers corresponding to the potential defect of interest; generating the die layout clip in accordance with the first data, the die layout clip comprising information indicative of one or more patterns characterizing an inspection area; and transmitting the generated die layout clip to the at least one inspection unit. - View Dependent Claims (14, 15, 16, 17, 18)
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Specification