METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
First Claim
1. A method of manufacturing a semiconductor device, comprising the steps of:
- (a) depositing a metal oxide film having O and at least one of Hf and Zr as a main component over a semiconductor substrate;
(b) depositing a conductor film over the metal oxide film; and
(c) subjecting the metal oxide film to microwave heat treatment.
1 Assignment
0 Petitions
Accused Products
Abstract
To allow a metal oxide film composed mainly of O and at least one of Hf and Zr to exhibit ferroelectric properties. After deposition of a hafnium oxide film on a semiconductor substrate via an insulating film, the semiconductor substrate is exposed to microwaves to selectively heat the hafnium oxide film. This makes it possible to form a larger number of orthorhombic crystals in the crystals of the hafnium oxide film. The hafnium oxide film thus obtained can therefore exhibit ferroelectric properties without adding, thereto, an impurity such as Si. This means that the hafnium oxide film having a reverse size effect can be used as a ferroelectric film of a ferroelectric memory cell and contributes to the manufacture of a miniaturized ferroelectric memory cell.
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Citations
17 Claims
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1. A method of manufacturing a semiconductor device, comprising the steps of:
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(a) depositing a metal oxide film having O and at least one of Hf and Zr as a main component over a semiconductor substrate; (b) depositing a conductor film over the metal oxide film; and (c) subjecting the metal oxide film to microwave heat treatment. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of manufacturing a semiconductor device, comprising the steps of:
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(a) depositing a first conductor film over a semiconductor substrate; (b) depositing, over the first conductor film, a metal oxide film having O and at least one of Hf and Zr as a main component; (c) depositing a second conductor film over the metal oxide film; and (d) subjecting the metal oxide film to microwave heat treatment. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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Specification