MEASUREMENT SUBSTRATE AND A MEASUREMENT METHOD
First Claim
1. A measurement substrate for measuring a condition pertaining in an apparatus for processing production substrates during operation thereof, the measurement substrate comprising:
- a body having dimensions similar to that of a production substrate so that the measurement substrate is compatible with the apparatus;
a plurality of sensor modules in the body, the plurality of sensor modules being arranged in a two-dimensional array, each sensor module comprising;
a sensor configured to generate an analog measurement signal, the sensor comprising at least a temperature sensor or a strain sensor.an analog to digital converter configured to generate digital measurement information from the analog measurement signal. anda module controller configured to output the digital measurement information; and
a central control module configured to receive the digital measurement information from each of the module controllers and to communicate the digital measurement information to an external device.
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Accused Products
Abstract
A measurement substrate for measuring a condition pertaining in an apparatus for processing production substrates during operation thereof, the measurement substrate including: a body having dimensions compatible with the apparatus; a plurality of sensor modules embedded in the body, each sensor module having: a sensor configured generate an analog measurement signal, an analog to digital converter to generate digital measurement information from the analog measurement signal, and a module controller configured to output the digital measurement information; and a central control module configured to receive the digital measurement information from each of the module controllers and to communicate the digital measurement information to an external device.
6 Citations
20 Claims
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1. A measurement substrate for measuring a condition pertaining in an apparatus for processing production substrates during operation thereof, the measurement substrate comprising:
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a body having dimensions similar to that of a production substrate so that the measurement substrate is compatible with the apparatus; a plurality of sensor modules in the body, the plurality of sensor modules being arranged in a two-dimensional array, each sensor module comprising; a sensor configured to generate an analog measurement signal, the sensor comprising at least a temperature sensor or a strain sensor. an analog to digital converter configured to generate digital measurement information from the analog measurement signal. and a module controller configured to output the digital measurement information; and a central control module configured to receive the digital measurement information from each of the module controllers and to communicate the digital measurement information to an external device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 19, 20)
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11. A method of measuring conditions in an apparatus for processing production substrates, the method comprising:
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loading into the apparatus a measurement substrate having dimensions similar to that of a production substrate so that the measurement substrate is compatible with the apparatus, the measurement substrate having a central control module and plurality of sensor modules, the plurality of sensor modules being arranged in a two-dimensional array, each sensor module comprising a sensor and an analog to digital converter, the sensor comprising at least a temperature sensor or a strain sensor; operating at least one of the sensors to generate an analog measurement signal; using at least one of the analog to digital converters to convert the analog measurement signal to digital measurement information; transferring the digital measurement information to the central control module; and outputting the digital measurement information from the central control module to an external device. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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Specification