LITHOGRAPHIC SYSTEMS AND METHODS
First Claim
1. A method comprising:
- illuminating a first location of a plasmonic substrate with electromagnetic radiation at a power density of 10 mW/μ
m2 or less;
wherein the electromagnetic radiation comprises a wavelength that overlaps with at least a portion of the plasmon resonance energy of the plasmonic substrate; and
wherein the plasmonic substrate is in thermal contact with a liquid sample comprising a plurality of particles;
thereby;
generating a bubble at a location in the liquid sample proximate to the first location of the plasmonic substrate by plasmon-enhanced photothermal effects, the bubble having a gas-liquid interface with the liquid sample;
trapping at least a portion of the plurality of particles at the gas-liquid interface of the bubble and the liquid sample; and
depositing at least a portion of the plurality of particles on the plasmonic substrate at the first location.
1 Assignment
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Accused Products
Abstract
Disclosed herein are lithographic systems and methods. For example, disclosed herein are methods comprising illuminating a first location of a plasmonic substrate with electromagnetic radiation; wherein the electromagnetic radiation comprises a wavelength that overlaps with at least a portion of the plasmon resonance energy of the plasmonic substrate; and wherein the plasmonic substrate is in thermal contact with a liquid sample comprising a plurality of particles; thereby: generating a bubble at a location in the liquid sample proximate to the first location of the plasmonic substrate, the bubble having a gas-liquid interface with the liquid sample; trapping at least a portion of the plurality of particles at the gas-liquid interface of the bubble and the liquid sample; and depositing at least a portion of the plurality of particles on the plasmonic substrate at the first location.
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Citations
57 Claims
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1. A method comprising:
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illuminating a first location of a plasmonic substrate with electromagnetic radiation at a power density of 10 mW/μ
m2 or less;wherein the electromagnetic radiation comprises a wavelength that overlaps with at least a portion of the plasmon resonance energy of the plasmonic substrate; and wherein the plasmonic substrate is in thermal contact with a liquid sample comprising a plurality of particles; thereby; generating a bubble at a location in the liquid sample proximate to the first location of the plasmonic substrate by plasmon-enhanced photothermal effects, the bubble having a gas-liquid interface with the liquid sample; trapping at least a portion of the plurality of particles at the gas-liquid interface of the bubble and the liquid sample; and depositing at least a portion of the plurality of particles on the plasmonic substrate at the first location. - View Dependent Claims (4, 6, 7, 9, 12, 27, 33, 36, 41, 42, 45, 47, 49, 51, 52, 53, 55, 56)
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2. (canceled)
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3. (canceled)
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5. (canceled)
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8. (canceled)
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10. (canceled)
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11. (canceled)
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13-26. -26. (canceled)
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28-32. -32. (canceled)
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34. (canceled)
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35. (canceled)
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37-40. -40. (canceled)
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43. (canceled)
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44. (canceled)
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46. (canceled)
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48. (canceled)
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50. (canceled)
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54. (canceled)
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57. A system comprising:
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a plasmonic substrate in thermal contact with a liquid sample comprising a plurality of particles; and a light source configured to illuminate the plasmonic substrate at a first location with electromagnetic radiation at a power density of 10 mW/μ
m2 and at a wavelength that overlaps with at least a portion of the plasmon resonance
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Specification