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LITHOGRAPHIC SYSTEMS AND METHODS

  • US 20180348128A1
  • Filed: 12/13/2016
  • Published: 12/06/2018
  • Est. Priority Date: 12/14/2015
  • Status: Active Application
First Claim
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1. A method comprising:

  • illuminating a first location of a plasmonic substrate with electromagnetic radiation at a power density of 10 mW/μ

    m2 or less;

    wherein the electromagnetic radiation comprises a wavelength that overlaps with at least a portion of the plasmon resonance energy of the plasmonic substrate; and

    wherein the plasmonic substrate is in thermal contact with a liquid sample comprising a plurality of particles;

    thereby;

    generating a bubble at a location in the liquid sample proximate to the first location of the plasmonic substrate by plasmon-enhanced photothermal effects, the bubble having a gas-liquid interface with the liquid sample;

    trapping at least a portion of the plurality of particles at the gas-liquid interface of the bubble and the liquid sample; and

    depositing at least a portion of the plurality of particles on the plasmonic substrate at the first location.

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