LITHOGRAPHIC SYSTEMS AND METHODS

• US 20180348128A1
• Filed: 12/13/2016
• Published: 12/06/2018
• Est. Priority Date: 12/14/2015
• Status: Active Application

• Current Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Original Assignee: Board of Regents of the University of Texas System (University of Texas System)
• Inventors: Zheng, Yuebing, Lin, Linhan, Peng, Xiaolei
• Granted Patent: US 10,281,398 B2
• Time in Patent Office: Days
• CPC Class Codes: G01N 21/553 and using surface plasmons fluorescence excitation G01N21/648; enhanced Raman G01N21/658
• CPC Class Codes: G03F 7/70025 by lasers

Abstract

Disclosed herein are lithographic systems and methods. For example, disclosed herein are methods comprising illuminating a first location of a plasmonic substrate with electromagnetic radiation; wherein the electromagnetic radiation comprises a wavelength that overlaps with at least a portion of the plasmon resonance energy of the plasmonic substrate; and wherein the plasmonic substrate is in thermal contact with a liquid sample comprising a plurality of particles; thereby: generating a bubble at a location in the liquid sample proximate to the first location of the plasmonic substrate, the bubble having a gas-liquid interface with the liquid sample; trapping at least a portion of the plurality of particles at the gas-liquid interface of the bubble and the liquid sample; and depositing at least a portion of the plurality of particles on the plasmonic substrate at the first location.

Claims

1. A method comprising:

illuminating a first location of a plasmonic substrate with electromagnetic radiation at a power density of 10 mW/μ

m² or less;

wherein the electromagnetic radiation comprises a wavelength that overlaps with at least a portion of the plasmon resonance energy of the plasmonic substrate; and

wherein the plasmonic substrate is in thermal contact with a liquid sample comprising a plurality of particles;

thereby;

generating a bubble at a location in the liquid sample proximate to the first location of the plasmonic substrate by plasmon-enhanced photothermal effects, the bubble having a gas-liquid interface with the liquid sample;

trapping at least a portion of the plurality of particles at the gas-liquid interface of the bubble and the liquid sample; and

depositing at least a portion of the plurality of particles on the plasmonic substrate at the first location.

4. The method of claim 1, wherein the electromagnetic radiation is provided by a light source and the light source is a laser.

6. The method of claim 1, wherein the plasmonic substrate comprises a plurality of plasmonic particles.

7. The method of claim 6, wherein the plurality of plasmonic particles comprise a plurality of metal particles and the plurality of metal particles comprise a metal selected from the group consisting of Au, Ag, Pd, Cu, Cr, Al, and combinations thereof.

9. The method of claim 6, wherein the plurality of plasmonic particles have an average particle size of from 10 nm to 300 nm.

12. The method of claim 6, wherein each plasmonic particle within the plurality of plasmonic particles on the substrate is separated from its neighboring plasmonic particles by an average distance of from 5 nm to 100 nm.

27. The method of claim 1, wherein the plurality of particles in the liquid sample comprise a plurality of thermoresponsive particles.

33. The method of claim 1, wherein the plurality of particles comprise a plurality of polystyrene spheres, a plurality of silica spheres, a plurality of quantum dots, a plurality of semiconductor nanowires, a plurality of biological cells, or a combination thereof.

36. The method of claim 1, wherein the portion of the plurality of particles are not damaged during the deposition.

41. The method of claim 1, wherein the portion of the plurality of particles deposited is one particle.

42. The method of claim 1, wherein the portion of the plurality of particles is deposited in an amount of time from 1 milliseconds to 5 seconds.

45. The method of claim 1, wherein the portion of the plurality of particles are trapped by convection, surface tension, gas pressure, substrate adhesion, or combinations thereof.

47. The method of claim 1, wherein the portion of the plurality of particles deposited on the substrate are immobilized on the plasmonic substrate by surface adhesion;

wherein the plasmonic substrate further comprises a ligand and the portion of the plurality of particles deposited on the substrate are immobilized on the plasmonic substrate by electrostatic attraction and/or chemical recognition with the ligand;

or a combination thereof.

49. The method of claim 1, wherein an additional layer is present between the plasmonic substrate and the liquid sample, the additional layer being in thermal contact with the plasmonic substrate and the liquid sample, such that the plurality of particles are deposited on the additional layer, and the additional layer comprises a two-dimensional atomic layer material.

51. The method of claim 49, wherein the additional layer comprises MoS₂, WSe₂, MoTe₂, WS₂, hexagonal BN, graphene, or combinations thereof.

52. The method of claim 1, further comprising illuminating a second location of the plasmonic substrate to deposit another portion of the plurality of particles at the second location.

53. The method of claim 52, wherein the plasmonic substrate is translocated to illuminate the second location;

wherein the electromagnetic radiation is provided by a light source, and the light source is translocated to illuminate the second location;

or a combination thereof.

55. A patterned substrate made using the method of claim 1.

56. A method of use of the patterned substrate of claim 55, wherein the patterned substrate is used for single-particle sensing, single-cell analysis, tissue engineering, functional optical devices, or combinations thereof.

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57. A system comprising:

a plasmonic substrate in thermal contact with a liquid sample comprising a plurality of particles; and

a light source configured to illuminate the plasmonic substrate at a first location with electromagnetic radiation at a power density of 10 mW/μ

m² and at a wavelength that overlaps with at least a portion of the plasmon resonance