SUBSTRATE PROCESSING APPARATUS AND STANDBY METHOD FOR EJECTION HEAD

• US 20180350592A1
• Filed: 08/06/2018
• Published: 12/06/2018
• Est. Priority Date: 03/15/2013
• Status: Active Grant

• Current Assignee: SCREEN Holdings Co., Ltd.
• Original Assignee: SCREEN Holdings Co., Ltd.
• Inventors: SOTOKU, Kota, YASHIKI, Hiroyuki, SATO, Masanobu
• Granted Patent: US 10,639,665 B2
• Time in Patent Office: Days
• CPC Class Codes: B05B 15/555 discharged by cleaning nozzles
• CPC Class Codes: H01L 21/02052 Wet cleaning only H01L21/02085 takes precedence
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles

Abstract

In a substrate processing apparatus, an ejection surface of an ejection head located at a standby position is immersed in an immersion liquid retained in a reservoir during standby of the ejection head. This prevents drying of a plurality of outlets provided in the ejection head and drying of processing liquid flow passages that communicate with the outlets. It is thus possible to suppress or prevent clogging of the fine outlets. When the ejection head resumes processing on a substrate, the immersion liquid in the reservoir is discharged and then a liquid removing part removes the immersion liquid adhering to the ejection surface. Accordingly, it is possible to prevent the immersion liquid remaining on the ejection surface from dropping and adhering to the substrate (so-called “liquid dripping”) when, for example, the ejection head is moved to a position above the substrate.

Claims

1. A standby method for an ejection head, said standby method being a method of placing said ejection head of a substrate processing apparatus on standby, said ejection head being disposed inside a cup part and above a substrate holding part surrounded by said cup part and being configured to eject a processing liquid from an outlet provided in an ejection surface toward a substrate held by said substrate holding part,

said standby method comprising:

a) moving said ejection head from a position inside said cup part to a position outside said cup part;

b) causing relative movement of said ejection head and a reservoir in which an immersion liquid is retained, in a direction that said ejection head and said reservoir become closer to each other to immerse said ejection surface of said ejection head in said immersion liquid;

c) separating said ejection surface from said immersion liquid either by discharging said immersion liquid from said reservoir or by causing relative movement of said ejection head and said reservoir in a direction that said ejection head and said reservoir become away from each other;

d) removing said immersion liquid that remains on said ejection surface; and

e) moving said ejection head to a position inside said cup part, wherein

said ejection head includes;

a head body part having an outer surface, part of which is said ejection surface, and for holding said processing liquid therein; and

a piezoelectric element attached to said head body part and for vibrating said processing liquid held in said head body part to cause the ejection of said processing liquid from said outlet, and

said piezoelectric element is driven to vibrate said immersion liquid retained in said reservoir in a state where said ejection surface is immersed in said immersion liquid in said operation b).

2. The standby method for the ejection head according to claim 1, wherein

said processing liquid is continuously or intermittently ejected from said outlet in a state where said ejection surface is immersed in said immersion liquid between said operation b) and said operation c).

3. The standby method for the ejection head according to claim 2, wherein

the ejection of said processing liquid from said outlet is stopped before said operation c).

4. The standby method for the ejection head according to claim 1, wherein

said immersion liquid that remains on said ejection surface is removed by emitting gas toward said ejection head in a direction away from said substrate holding part in said operation d).

5. The standby method for the ejection head according to claim 1, wherein

said immersion liquid is continuously or intermittently supplied and discharged into and from said reservoir in a state where said ejection surface is immersed in said immersion liquid between said operation b) and said operation c).

6. The standby method for the ejection head according to claim 5, wherein

said immersion liquid is supplied from a bottom of said reservoir and discharged from a top of said reservoir.

7. The standby method for the ejection head according to claim 1, wherein

said immersion liquid is the same type of liquid as said processing liquid.

8. The standby method for the ejection head according to claim 1, wherein

said ejection surface is formed of a lyophilic material having a high affinity for said immersion liquid.

9. The standby method for the ejection head according to claim 1, wherein

said substrate is cleaned with said processing liquid ejected from said ejection head toward said substrate.

10. A standby method for an ejection head, said standby method being a method of placing said ejection head of a substrate processing apparatus on standby, said ejection head being disposed inside a cup part and above a substrate holding part surrounded by said cup part and being configured to eject a processing liquid from an outlet provided in an ejection surface toward a substrate held by said substrate holding part,

said standby method comprising:

a) moving said ejection head from a position inside said cup part to a position outside said cup part;

b) causing relative movement of said ejection head and a reservoir in which an immersion liquid is retained, in a direction that said ejection head and said reservoir become closer to each other to immerse said ejection surface of said ejection head in said immersion liquid;

c) separating said ejection surface from said immersion liquid by discharging said immersion liquid from said reservoir;

d) removing said immersion liquid that remains on said ejection surface by emitting gas toward said ejection head inside said reservoir after said operation c); and

e) moving said ejection head to a position inside said cup part.

11. The standby method for the ejection head according to claim 10, wherein

said processing liquid is continuously or intermittently ejected from said outlet in a state where said ejection surface is immersed in said immersion liquid between said operation b) and said operation c).

12. The standby method for the ejection head according to claim 11, wherein

the ejection of said processing liquid from said outlet is stopped before said operation c).

13. The standby method for the ejection head according to claim 10, wherein

said reservoir is provided with a lid part for covering a top of said reservoir,

said lid part having an insertion opening through which a lower end portion of said ejection head is inserted in said operation b).

14. The standby method for the ejection head according to claim 10, wherein

said immersion liquid is continuously or intermittently supplied and discharged into and from said reservoir in a state where said ejection surface is immersed in said immersion liquid between said operation b) and said operation c).

15. The standby method for the ejection head according to claim 14, wherein

said immersion liquid is supplied from a bottom of said reservoir and discharged from a top of said reservoir.

16. The standby method for the ejection head according to claim 10, wherein

said immersion liquid is the same type of liquid as said processing liquid.

17. The standby method for the ejection head according to claim 10, wherein

said ejection surface is formed of a lyophilic material having a high affinity for said immersion liquid.

18. The standby method for the ejection head according to claim 10, wherein

said substrate is cleaned with said processing liquid ejected from said ejection head toward said substrate.