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METHOD AND SYSTEM FOR SURFACE MODIFICATION OF SUBSTRATE FOR ION BEAM TARGET

  • US 20180352643A1
  • Filed: 06/05/2017
  • Published: 12/06/2018
  • Est. Priority Date: 06/05/2017
  • Status: Active Grant
First Claim
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1. A method for making a neutron generating target, the method comprising:

  • modifying a surface of a target substrate to form one or more surface features; and

    disposing a neutron source layer on the surface of the target substrate.

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