MANUFACTURING METHOD OF BONDED-SUBSTRATE ARTICLE, MANUFACTURING METHOD OF LIQUID DISCHARGE HEAD, BONDED-SUBSTRATE ARTICLE, AND LIQUID DISCHARGE HEAD
First Claim
1. A manufacturing method for a bonded-substrate article where a first substrate has a first bonding region and a second bonding region that are both bonded to a second substrate, and the second substrate has a third bonding region and a fourth bonding region that are both bonded to the first substrate, the method comprising:
- first bonding, where the first bonding region of the first substrate and the third bonding region of the second substrate are bonded at a first temperature; and
second bonding, following the first bonding, where the second bonding region of the first substrate and the fourth bonding region of the second substrate are bonded at a second temperature,wherein the first temperature is lower than the second temperature.
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Abstract
A manufacturing method for a bonded-substrate article includes a first bonding where a first bonding region of a first substrate and a third bonding region of a second substrate are bonded at a first temperature, and a second bonding, following the first bonding, where a second bonding region of the first substrate and a fourth bonding region of the second substrate are bonded at a second temperature. The first temperature is lower than the second temperature.
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Citations
20 Claims
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1. A manufacturing method for a bonded-substrate article where a first substrate has a first bonding region and a second bonding region that are both bonded to a second substrate, and the second substrate has a third bonding region and a fourth bonding region that are both bonded to the first substrate, the method comprising:
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first bonding, where the first bonding region of the first substrate and the third bonding region of the second substrate are bonded at a first temperature; and second bonding, following the first bonding, where the second bonding region of the first substrate and the fourth bonding region of the second substrate are bonded at a second temperature, wherein the first temperature is lower than the second temperature. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A manufacturing method for a liquid discharge head having a bonded-substrate article where a first substrate has a first bonding region and a second bonding region that are both bonded to a second substrate, and the second substrate has a third bonding region and a fourth bonding region that are both bonded to the first substrate, and the bonded-substrate article has a liquid channel traversing the first substrate and the second substrate, the method comprising:
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first bonding, where the first bonding region of the first substrate and the third bonding region of the second substrate are bonded at a first temperature; and second bonding, following the first bonding, where the second bonding region of the first substrate and the fourth bonding region of the second substrate are bonded at a second temperature, wherein the first temperature is lower than the second temperature. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A bonded-substrate article where a first substrate and a second substrate are bonded,
wherein the first substrate that has a first bonding region and a second bonding region that are both bonded to the second substrate, wherein the second substrate that has a third bonding region and a fourth bonding region that are both bonded to the first substrate, wherein the first bonding region of the first substrate and the third bonding region of the second substrate are bonded by direct bonding, and the second bonding region of the first substrate and the fourth bonding region of the second substrate are bonded via an adhesive agent.
Specification