PLATING APPARATUS AND RECORDING MEDIUM RECORDING PROGRAM THEREON
First Claim
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1. A plating apparatus for applying a plating process on a substrate by using a substrate holding member, the plating apparatus comprising:
- a plating tank;
a first member disposed in the plating tank at a position opposite to the substrate holding member when the substrate holding member is placed in the plating tank;
an optical sensor disposed on one of the substrate holding member and the first member; and
a plurality of detected parts disposed on the other of the substrate holding member and the first member to be detectable by the optical sensor.
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Abstract
The disclosure improves a position confirmation method for members in a plating tank. A plating apparatus for applying a plating process on a substrate is provided. The plating apparatus includes a plating tank, a first member disposed in the plating tank, a second member disposed opposite to the first member in the plating tank, an optical sensor disposed on one of the first and second members, and a plurality of detected parts disposed on the other of the first and second members to be detectable by the optical sensor.
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Citations
18 Claims
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1. A plating apparatus for applying a plating process on a substrate by using a substrate holding member, the plating apparatus comprising:
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a plating tank; a first member disposed in the plating tank at a position opposite to the substrate holding member when the substrate holding member is placed in the plating tank; an optical sensor disposed on one of the substrate holding member and the first member; and a plurality of detected parts disposed on the other of the substrate holding member and the first member to be detectable by the optical sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A recording medium storing a program for executing a control method of a plating apparatus, wherein when a substrate holding member that holds a substrate is placed opposite to a first member in a plating tank, the program stored in the recording medium enables a computer to:
determine whether the substrate holding member is in a predetermined position in the plating tank by detecting, with an optical sensor disposed on one of the substrate holding member and the first member, a detected part disposed on the other of the substrate holding member and the first member. - View Dependent Claims (17)
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18. A plating apparatus for applying a plating process on a substrate, the plating apparatus comprising:
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a plating tank; a first member disposed in the plating tank; a second member disposed opposite to the first member in the plating tank; an optical sensor disposed on one of the first member and the second member; and a plurality of detected parts disposed on the other of the first member and the second member to be detectable by the optical sensor.
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Specification