WAFER STORAGE CONTAINER
First Claim
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1. A wafer storage container comprising:
- a storage chamber wherein the wafers are stored;
a gas hole located in the lower side of the storage chamber; and
a gas chamber communicating with the gas holes, located in the outer side surface of the storage chamber so as to be communicating with the storage chamber.
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Abstract
The present invention relates to a wafer storage container, more particularly, relates to a wafer storage container comprising a storage chamber forming an independent space separated from the wafer storage container, and a plurality of gas chambers communicating with the storage chamber, so that the gases are being supplied or exhausted through the area of the side surfaces of the storage chamber via the gas chambers in order to remove the fumes remaining on the surface of a wafer stored inside the wafer storage container efficiently,
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Citations
22 Claims
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1. A wafer storage container comprising:
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a storage chamber wherein the wafers are stored; a gas hole located in the lower side of the storage chamber; and a gas chamber communicating with the gas holes, located in the outer side surface of the storage chamber so as to be communicating with the storage chamber. - View Dependent Claims (2, 3, 4, 5, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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6-8. -8. (canceled)
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22-24. -24. (canceled)
Specification