VERTICAL-CAVITY SURFACE-EMITTING LASER LAYOUT FOR HIGH BANDWIDTH OUTPUT

• US 20180375287A1
• Filed: 06/22/2018
• Published: 12/27/2018
• Est. Priority Date: 06/26/2017
• Status: Active Grant

• Current Assignee: Mellanox Technologies Limited (NVIDIA Corporation)
• Original Assignee: Mellanox Technologies Limited (NVIDIA Corporation)
• Inventors: Kalifa, Itshak, Mentovich, Elad, Rockman, Sylvie
• Granted Patent: US 11,165,224 B2
• Time in Patent Office: Days
• CPC Class Codes: G01R 31/2644 Adaptations of individual semiconductor devices to facilitate the testing thereof
• CPC Class Codes: G01R 31/44 Testing lamps
• CPC Class Codes: H01S 2301/176 Specific passivation layers on surfaces other than the emission facet
• CPC Class Codes: H01S 5/0014 Measuring characteristics or properties thereof measuring techniques per se G01J, G01K, G01N, G01R
• CPC Class Codes: H01S 5/02345 Wire-bonding
• CPC Class Codes: H01S 5/04254 characterised by the shape
• CPC Class Codes: H01S 5/04257 having positive and negative electrodes on the same side of the substrate
• CPC Class Codes: H01S 5/06226 Modulation at ultra-high frequencies
• CPC Class Codes: H01S 5/18344 characterized by the mesa, e.g. dimensions or shape of the mesa
• CPC Class Codes: H01S 5/18394 Apertures, e.g. defined by the shape of the upper electrode
• CPC Class Codes: H01S 5/423 having a vertical cavity

Abstract

A layout for a vertical-cavity surface-emitting laser (VCSEL) is provided. In an example embodiment, the layout comprises a VCSEL, an etched shape around a mesa of the VCSEL, a signal contact layer deposited on section of the mesa, and a ground contact layer. The ground contact layer comprises three parts and is positioned around a first section of the etched shape. The first part of the ground contact layer is deposited on a second section of the etched shape. The second and third parts of the ground contact layer comprise two legs off of the first part. The two legs are symmetrically positioned about two sides of the signal contact layer to form a ground-signal-ground configuration.

Claims

1. A layout for a vertical-cavity surface-emitting laser (VCSEL) comprising:

a VCSEL;

an etched shape around a mesa of the VCSEL;

a signal contact layer deposited on a section of the mesa of the VCSEL; and

a ground contact layer comprising three parts and positioned around a first section of the etched shape, wherein (a) a first part of the ground contact layer is deposited on a second section of the etched shape, and (b) a second and third part of the ground contact layer comprise each comprise a leg extending from the first part, and wherein the legs are symmetrically positioned about two sides of the signal contact layer to form a ground-signal-ground configuration.

2. The layout of claim 1, wherein the signal contact layer comprises a probe notch, wherein the probe notch is configured to guide a testing probe.

3. The layout of claim 1, wherein the etched shape is a portion of an annulus about the mesa of the VCSEL.

4. The layout of claim 3, wherein an interior edge of the annulus has a mesa diameter defined by the mesa and an outer edge of the annulus has a second diameter defined by the first part of the of the ground contact layer.

5. The layout of claim 1, wherein a first gap defining a first width is disposed between the second part of the ground contact layer and the signal contact layer and a second gap defining a second width is disposed between the third part of the ground contact layer and the signal contact layer, the first width being approximately the same as the second width.

6. The layout of claim 5, wherein the first width and the second width are between 19 and 20 micrometers.

11. The layout of claim 1, wherein a first gap defining a first width is disposed between the first leg portion of the ground contact layer and the signal contact layer and a second gap defining a second width is disposed between the second leg portion of the ground contact layer and the signal contact layer, the first width being approximately the same as the second width.

12. The layout of claim 11, wherein the first width and the second width are between 19 and 20 micrometers.

7. A layout for a vertical-cavity surface-emitting laser (VCSEL) comprising:

a VCSEL;

a signal contact layer deposited on a section of a mesa of the VCSEL;

a ground contact layer comprising a first leg portion, a second leg portion, and an arc portion, the arc portion partially encircling the mesa and the first leg portion and the second leg portion extending symmetrically from opposite ends of the arc portion, wherein the signal contact layer extends between the first leg portion and the second leg portion to form a ground-signal-ground configuration; and

an etched shape positioned between the arc portion of the ground contact layer and a corresponding portion of the signal contact layer.

8. The layout of claim 7, wherein the signal contact layer comprises a probe notch, wherein the probe notch is configured to guide a testing probe.

9. The layout of claim 7, wherein the etched shape is a portion of an annulus about the mesa of the VCSEL.

10. The layout of claim 9, wherein an interior edge of the annulus has a mesa diameter defined by the mesa and an outer edge of the annulus has a second diameter defined by the arc portion of the ground contact layer.

13. A layout for a vertical-cavity surface-emitting laser (VCSEL) comprising:

a VCSEL;

a signal contact layer deposited on a section of a mesa of the VCSEL; and

a ground contact layer comprising a first leg portion, a second leg portion, and an arc portion, the arc portion partially encircling the mesa and the first leg portion and the second leg portion extending symmetrically from opposite ends of the arc portion, wherein the signal contact layer extends between the first leg portion and the second leg portion to form a ground-signal-ground configuration,

wherein the signal contact layer comprises a probe notch, wherein the probe notch is configured to guide a testing probe.

14. The layout of claim 13, wherein the probe notch is a V-shaped notch.

15. The layout of claim 13, wherein the notch comprises a notch opening that is 20 to 25 micrometers wide.

16. The layout of claim 13, wherein the notch extends 10 to 25 micrometers into the signal contact layer.

17. The layout of claim 13, further comprising an etched shape positioned between the arc portion of the ground contact layer and a corresponding portion of the signal contact layer.