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ETCHING COMPOSITIONS AND METHOD OF ETCHING BY USING THE SAME

  • US 20190010398A1
  • Filed: 07/03/2018
  • Published: 01/10/2019
  • Est. Priority Date: 07/06/2017
  • Status: Active Grant
First Claim
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1. An etching composition comprising:

  • phosphoric acid; and

    a compound represented by Formula. 1,

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