THERMAL TYPE FLOWMETER
First Claim
1. A thermal type flowmeter comprising:
- a sensor including a heater that heats a fluid to be measured, the sensor being configured to output a first value corresponding to a state of thermal diffusion in the fluid heated by the heater which is being driven in such a manner that a difference between a temperature of the heater and a temperature of the fluid at a location free from thermal influence of the heater is equal to a predetermined temperature difference;
a correcting unit configured to calculate a second value by correcting the first value in accordance with the temperature of the fluid; and
a flow-rate calculating unit configured to calculate a flow rate of the fluid from the second value calculated by the correcting unit.
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Accused Products
Abstract
A thermal type flowmeter includes a sensor, a correcting unit, and a flow-rate calculating unit. The sensor outputs a sensor value (first value) corresponding to the state of thermal if fusion in a fluid heated by a heater which is being driven in such a manner that the difference between the temperature of the heater and the temperature of the fluid at a location free from thermal influence of the heater is equal to a predetermined temperature difference. The correcting unit calculates a corrected sensor value (second value) by correcting the sensor value output by the sensor, in accordance with the temperature of the fluid, and outputs the corrected sensor value. The flow-rate calculating unit calculates the flow rate of the fluid from the corrected sensor value calculated by the correcting unit.
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Citations
5 Claims
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1. A thermal type flowmeter comprising:
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a sensor including a heater that heats a fluid to be measured, the sensor being configured to output a first value corresponding to a state of thermal diffusion in the fluid heated by the heater which is being driven in such a manner that a difference between a temperature of the heater and a temperature of the fluid at a location free from thermal influence of the heater is equal to a predetermined temperature difference; a correcting unit configured to calculate a second value by correcting the first value in accordance with the temperature of the fluid; and a flow-rate calculating unit configured to calculate a flow rate of the fluid from the second value calculated by the correcting unit. - View Dependent Claims (2, 3, 4, 5)
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Specification