Metal Oxide Film and Semiconductor Device
First Claim
Patent Images
1. A metal oxide film comprising:
- indium;
which is Al, Ga, Y, or Sn; and
zinc,wherein a plurality of crystal parts is observed in a transmission electron microscope image in a direction perpendicular to a surface of the metal oxide film, andwherein a proportion of a region other than the plurality of crystal parts is higher than or equal to 20% and lower than or equal to 60%.
0 Assignments
0 Petitions
Accused Products
Abstract
A metal oxide film includes indium, , ( is Al, Ga, Y, or Sn), and zinc and includes a region where a peak having a diffraction intensity derived from a crystal structure is observed by X-ray diffraction in the direction perpendicular to the film surface. Moreover, a plurality of crystal parts is observed in a transmission electron microscope image in the direction perpendicular to the film surface. The proportion of a region other than the crystal parts is higher than or equal to 20% and lower than or equal to 60%.
-
Citations
9 Claims
-
1. A metal oxide film comprising:
-
indium; which is Al, Ga, Y, or Sn; and zinc, wherein a plurality of crystal parts is observed in a transmission electron microscope image in a direction perpendicular to a surface of the metal oxide film, and wherein a proportion of a region other than the plurality of crystal parts is higher than or equal to 20% and lower than or equal to 60%. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A semiconductor device comprising:
-
a transistor comprising a semiconductor layer comprising a metal oxide film, wherein the metal oxide film comprises indium, which is Al, Ga, Y, or Sn, and zinc, wherein a plurality of crystal parts is observed in a transmission electron microscope image in a direction perpendicular to a surface of the metal oxide film, and wherein a proportion of a region other than the plurality of crystal parts is higher than or equal to 20% and lower than or equal to 60%.
-
-
9. A semiconductor device comprising:
-
a transistor comprising a semiconductor layer comprising a metal oxide film, wherein the metal oxide film comprises indium, which is Al, Ga, Y, or Sn, and zinc, wherein a plurality of crystal parts is observed in a transmission electron microscope image in a direction perpendicular to a surface of the metal oxide film, wherein a proportion of a region other than the plurality of crystal parts is higher than or equal to 20% and lower than or equal to 60%, and wherein the plurality of crystal parts has a higher proportion of crystal parts in which c-axes are aligned in a thickness direction than crystal parts aligned in other directions.
-
Specification