DRIVE MODE AND SENSE MODE RESONANCE FREQUENCY MATCHING
First Claim
1. A micro electro mechanical system (MEMS) comprising:
- a proof mass configured to move responsive to stimuli;
sense electrodes configured to generate a signal responsive to the proof mass moving;
sense circuitry coupled to the sense electrodes, wherein the sense circuitry is configured to receive the generated signal and further configured to process the generated signal; and
a frequency matching circuitry configured to apply a direct current (DC) voltage to the sense electrodes, wherein the DC voltage is configured to change a stiffness of a spring of the proof mass and wherein the change in the stiffness of the spring matches a resonance frequency between a sense mode and a drive mode.
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Accused Products
Abstract
In some embodiments, a micro electro mechanical system (MEMS) includes a proof mass, sense electrodes, sense circuitry, and a frequency matching circuitry. The proof mass is configured to move responsive to stimuli. The sense electrodes are configured to generate a signal responsive to the proof mass moving. The sense circuitry is coupled to the sense electrodes. The sense circuitry is configured to receive the generated signal and further configured to process the generated signal. The frequency matching circuitry is configured to apply a DC voltage to the sense electrodes. The DC voltage is configured to change a stiffness of a spring of the proof mass. According to some embodiments, the change in the stiffness of the spring matches a resonance frequency between a sense mode and a drive mode. According to some embodiments, the sense electrodes are a comb structure.
6 Citations
20 Claims
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1. A micro electro mechanical system (MEMS) comprising:
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a proof mass configured to move responsive to stimuli; sense electrodes configured to generate a signal responsive to the proof mass moving; sense circuitry coupled to the sense electrodes, wherein the sense circuitry is configured to receive the generated signal and further configured to process the generated signal; and a frequency matching circuitry configured to apply a direct current (DC) voltage to the sense electrodes, wherein the DC voltage is configured to change a stiffness of a spring of the proof mass and wherein the change in the stiffness of the spring matches a resonance frequency between a sense mode and a drive mode. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A micro electro mechanical system (MEMS) comprising:
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a proof mass configured to move responsive to stimuli; sense electrodes configured to generate a signal responsive to the proof mass moving; and a frequency modifying circuitry configured to apply a direct current (DC) voltage to the sense electrodes, wherein the DC voltage is configured to change a stiffness of a spring of the proof mass, and wherein the change in the stiffness of the spring changes a resonance frequency in a sense mode and in a drive mode. - View Dependent Claims (9, 10, 11, 12, 13)
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14. A method comprising:
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generating a signal, using sense electrodes, responsive to a stimuli displacing a proof mass; applying a direct current (DC) voltage to the sense electrodes; and responsive to the applying the DC voltage, changing a stiffness of a spring of the proof mass, wherein the DC voltage is selected to change the stiffness to match a resonance frequency between a sense mode and a drive mode. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification