VACUUM PROCESSING DEVICE AND MASS ANALYZING DEVICE

• US 20190066990A1
• Filed: 11/20/2015
• Published: 02/28/2019
• Est. Priority Date: 11/20/2015
• Status: Active Grant

• Current Assignee: Shimadzu Corporation
• Original Assignee: Shimadzu Corporation
• Inventors: MATSUSHITA, Tomoyoshi
• Granted Patent: US 10,643,831 B2
• Time in Patent Office: Days
• CPC Class Codes: G01N 27/628 and a beam of energy, e.g. laser enhanced ionisation
• CPC Class Codes: H01J 2237/2006 Vacuum seals
• CPC Class Codes: H01J 2237/20221 Translation
• CPC Class Codes: H01J 2237/20278 Motorised movement
• CPC Class Codes: H01J 49/0004 Imaging particle spectrometry
• CPC Class Codes: H01J 49/0409 Sample holders or containers containers for retaining a material to be analyzed, B01L3/50, for DNA, C12Q1/6834, for biological materials, G01N33/543
• CPC Class Codes: H01J 49/0418 for laser desorption, e.g. matrix-assisted laser desorption/ionisation [MALDI] plates or surface enhanced laser desorption/ionisation [SELDI] plates
• CPC Class Codes: H01J 49/161 using photoionisation, e.g. by laser

Abstract

A vacuum processing apparatus 100 includes: a vacuum chamber 1; a stage 2 placed inside the vacuum chamber 1, on which an object to be processed is placed; an internal guide rail 31 laid in the vacuum chamber 1 to guide the stage 2; a through-hole 103 made in a sidewall 102 of the vacuum chamber 1; a connecting rod 4 coupled to the stage 2 at one end and inserted in the through-hole 103, the other end being disposed outside the vacuum chamber 1; a movable member 5 connected to the other end of the connecting rod 4; a driving mechanism 8 disposed outside the vacuum chamber 1 to move the movable member 5; and a bellows 6 disposed between the movable member 5 and the sidewall 102, the bellows 6 following the movement of the movable member 5 while maintaining airtightness of the vacuum chamber 1.

Claims

1-6. -6. (canceled)

7. A vacuum processing apparatus comprising:

a vacuum chamber;

a stage disposed inside the vacuum chamber, on which an object to be processed is placed;

an internal guide rail laid in the vacuum chamber to guide the stage;

a through-hole made in a sidewall of the vacuum chamber;

a connecting rod coupled to the stage at one end and inserted in the through-hole, the other end being disposed outside the vacuum chamber;

a movable member connected to the other end of the connecting rod;

a driving mechanism disposed outside the vacuum chamber to move the movable member; and

a bellows disposed between the movable member and the sidewall, the bellows following a movement of the movable member while maintaining airtightness of the vacuum chamber.

8. The vacuum processing apparatus according to claim 7, further comprising:

an external guide rail laid outside the vacuum chamber to guide the movable member; and

a common base extending across an inside and an outside of the vacuum chamber, the internal guide rail and the external guide rail being installed on an upper surface of the common base.

9. The vacuum processing apparatus according to claim 7, wherein

the internal guide rail includes:

a first internal guide rail laid along a first direction parallel to an extending direction of the connecting rod; and

a second internal guide rail laid along a second direction crossing the first direction,

the driving mechanism includes;

a first driving mechanism that moves the movable member along the first direction; and

a second driving mechanism that moves the movable member along the second direction, and

a width of the through-hole along the second direction is larger than a moving range of the connecting rod along the second direction.

10. The vacuum processing apparatus according to claim 8, wherein

the internal guide rail includes:

a first internal guide rail laid along a first direction parallel to an extending direction of the connecting rod; and

a second internal guide rail laid along a second direction crossing the first direction,

the driving mechanism includes;

a first driving mechanism that moves the movable member along the first direction; and

a second driving mechanism that moves the movable member along the second direction, and

a width of the through-hole along the second direction is larger than a moving range of the connecting rod along the second direction.

11. A mass spectrometer comprising:

a vacuum chamber;

a stage disposed inside the vacuum chamber, on which an object to be processed is placed;

an internal guide rail laid in the vacuum chamber to guide the stage;

a through-hole made in a sidewall of the vacuum chamber;

a connecting rod coupled to the stage at one end and inserted in the through-hole, the other end being disposed outside the vacuum chamber;

a movable member connected to the other end of the connecting rod;

a driving mechanism disposed outside the vacuum chamber to move the movable member; and

a bellows disposed between the movable member and the sidewall, the bellows following a movement of the movable member while maintaining airtightness of the vacuum chamber.

12. The mass spectrometer according to claim 11, further comprising:

an external guide rail laid outside the vacuum chamber to guide the movable member; and

a common base extending across an inside and an outside of the vacuum chamber, the internal guide rail and the external guide rail being installed on an upper surface of the common base.

13. The mass spectrometer according to claim 11, wherein

the internal guide rail includes:

a first internal guide rail laid along a first direction parallel to an extending direction of the connecting rod; and

a second internal guide rail laid along a second direction crossing the first direction,

the driving mechanism includes;

a first driving mechanism that moves the movable member along the first direction; and

a second driving mechanism that moves the movable member along the second direction, and

a width of the through-hole along the second direction is larger than a moving range of the connecting rod along the second direction.

14. The mass spectrometer according to claim 12, wherein

the internal guide rail includes:

a first internal guide rail laid along a first direction parallel to an extending direction of the connecting rod; and

a second internal guide rail laid along a second direction crossing the first direction,

the driving mechanism includes;

a first driving mechanism that moves the movable member along the first direction; and

a second driving mechanism that moves the movable member along the second direction, and

a width of the through-hole along the second direction is larger than a moving range of the connecting rod along the second direction.