VACUUM PROCESSING DEVICE AND MASS ANALYZING DEVICE
1 Assignment
0 Petitions
Accused Products
Abstract
A vacuum processing apparatus 100 includes: a vacuum chamber 1; a stage 2 placed inside the vacuum chamber 1, on which an object to be processed is placed; an internal guide rail 31 laid in the vacuum chamber 1 to guide the stage 2; a through-hole 103 made in a sidewall 102 of the vacuum chamber 1; a connecting rod 4 coupled to the stage 2 at one end and inserted in the through-hole 103, the other end being disposed outside the vacuum chamber 1; a movable member 5 connected to the other end of the connecting rod 4; a driving mechanism 8 disposed outside the vacuum chamber 1 to move the movable member 5; and a bellows 6 disposed between the movable member 5 and the sidewall 102, the bellows 6 following the movement of the movable member 5 while maintaining airtightness of the vacuum chamber 1.
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Citations
14 Claims
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1-6. -6. (canceled)
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7. A vacuum processing apparatus comprising:
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a vacuum chamber; a stage disposed inside the vacuum chamber, on which an object to be processed is placed; an internal guide rail laid in the vacuum chamber to guide the stage; a through-hole made in a sidewall of the vacuum chamber; a connecting rod coupled to the stage at one end and inserted in the through-hole, the other end being disposed outside the vacuum chamber; a movable member connected to the other end of the connecting rod; a driving mechanism disposed outside the vacuum chamber to move the movable member; and a bellows disposed between the movable member and the sidewall, the bellows following a movement of the movable member while maintaining airtightness of the vacuum chamber. - View Dependent Claims (8, 9, 10)
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11. A mass spectrometer comprising:
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a vacuum chamber; a stage disposed inside the vacuum chamber, on which an object to be processed is placed; an internal guide rail laid in the vacuum chamber to guide the stage; a through-hole made in a sidewall of the vacuum chamber; a connecting rod coupled to the stage at one end and inserted in the through-hole, the other end being disposed outside the vacuum chamber; a movable member connected to the other end of the connecting rod; a driving mechanism disposed outside the vacuum chamber to move the movable member; and a bellows disposed between the movable member and the sidewall, the bellows following a movement of the movable member while maintaining airtightness of the vacuum chamber. - View Dependent Claims (12, 13, 14)
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Specification