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FLOW RATE CONTROL DEVICE

  • US 20190085988A1
  • Filed: 02/23/2017
  • Published: 03/21/2019
  • Est. Priority Date: 02/29/2016
  • Status: Active Grant
First Claim
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1. A flow controller comprising:

  • a control valve;

    a first flow passage provided on a downstream side of the control valve;

    a second flow passage; and

    an expansion chamber provided between the first flow passage and the second flow passage,wherein the second flow passage is provided in a position that is not on an extension of the first flow passage.

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