FLOW RATE CONTROL DEVICE
First Claim
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1. A flow controller comprising:
- a control valve;
a first flow passage provided on a downstream side of the control valve;
a second flow passage; and
an expansion chamber provided between the first flow passage and the second flow passage,wherein the second flow passage is provided in a position that is not on an extension of the first flow passage.
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Abstract
The flow controller according to the present invention includes: a control valve; a first flow passage provided on the downstream side of the control valve; a second flow passage; and an expansion chamber provided between the first flow passage and the second flow passage. The second flow passage is provided in a position that is not on the extension of the first flow passage.
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Citations
22 Claims
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1. A flow controller comprising:
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a control valve; a first flow passage provided on a downstream side of the control valve; a second flow passage; and an expansion chamber provided between the first flow passage and the second flow passage, wherein the second flow passage is provided in a position that is not on an extension of the first flow passage. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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2. A flow controller comprising:
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a control valve; a first flow passage provided on a downstream side of the control valve; a second flow passage; an expansion chamber provided between the first flow passage and the second flow passage; and a distribution plate disposed in the expansion chamber. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification