DEPOSITION MASK, APPARATUS FOR MANUFACTURING DISPLAY APPARATUS, AND METHOD OF MANUFACTURING DISPLAY APPARATUS
First Claim
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1. A method of manufacturing a display apparatus, the method comprising:
- inserting a substrate and a mask frame assembly into an inside of a chamber;
aligning the substrate and the mask frame assembly; and
depositing, on the substrate, a depositing material ejected from a deposition source and passed through the mask frame assembly,wherein the mask frame assembly comprises;
a frame comprising an opening at a center portion thereof;
a deposition mask disposed on the frame facing the substrate, the deposition mask being installed on the frame while being extended in a first direction by a clamp attached to both ends of the deposition mask; and
a support stick extending in a second direction crossing the first direction, covering a part of the deposition mask, and supporting the deposition mask, wherein the deposition mask comprises;
a pattern portion comprising a plurality of pattern holes; and
a clamping portion comprising a protrusion portion to be attached to the clamp and an indentation portion formed in a direction toward the pattern portion,wherein the pattern portion comprises a blocking portion that at least partially overlaps the protrusion portion in the first direction and has an area gradually decreasing in a second direction from the protrusion portion towards the indentation portion, the second direction crossing the first direction.
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Abstract
A deposition mask extending in a first direction may include: a pattern portion including a plurality of pattern holes; and a clamping portion including a protrusion portion to be attached to the clamp and an indentation portion formed in a direction toward the pattern portion, wherein the pattern portion may include a blocking portion that at least partially overlaps the protrusion portion in the first direction and has an area gradually decreasing in a second direction from the protrusion portion toward the indentation portion, the second direction crossing the first direction.
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Citations
6 Claims
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1. A method of manufacturing a display apparatus, the method comprising:
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inserting a substrate and a mask frame assembly into an inside of a chamber; aligning the substrate and the mask frame assembly; and depositing, on the substrate, a depositing material ejected from a deposition source and passed through the mask frame assembly, wherein the mask frame assembly comprises; a frame comprising an opening at a center portion thereof; a deposition mask disposed on the frame facing the substrate, the deposition mask being installed on the frame while being extended in a first direction by a clamp attached to both ends of the deposition mask; and a support stick extending in a second direction crossing the first direction, covering a part of the deposition mask, and supporting the deposition mask, wherein the deposition mask comprises; a pattern portion comprising a plurality of pattern holes; and a clamping portion comprising a protrusion portion to be attached to the clamp and an indentation portion formed in a direction toward the pattern portion, wherein the pattern portion comprises a blocking portion that at least partially overlaps the protrusion portion in the first direction and has an area gradually decreasing in a second direction from the protrusion portion towards the indentation portion, the second direction crossing the first direction. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification