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WATER PROOFING AND WATER DETECTION SCHEMES FOR MEMS-BASED ENVIRONMENTAL SENSING DEVICES

  • US 20190100428A1
  • Filed: 09/28/2018
  • Published: 04/04/2019
  • Est. Priority Date: 09/29/2017
  • Status: Active Grant
First Claim
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1. A device comprising:

  • an environmental sensor configured to sense one or more environmental properties;

    an electronic integrated circuit implemented on a substrate and coupled to the environmental sensor via a wire bonding;

    an air-permeable cap structure formed over the environmental sensor; and

    a protective layer formed over the wire bonding to protect the wire bonding against a potential damage.

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