PROBE SYSTEM FOR MEASURING AT LEAST ONE MEASUREMENT OBJECT IN OPTICAL AND TACTILE FASHION
First Claim
1. A probe system for measuring at least one measurement object in an optical and tactile fashion, the probe system comprising:
- at least one tactile sensor, wherein the at least one tactile sensor includes at least one tactile probe element, wherein the at least one tactile probe element has a sensor surface, wherein the at least one tactile probe element is configured to probe the at least one measurement object in tactile fashion at at least one probing point on the sensor surface;
at least one microscope camera, wherein the at least one microscope camera has at least one illumination device configured to produce an illumination light beam, wherein the at least one microscope camera includes at least one microscope optical unit configured to focus the illumination light beam in the at least one probing point and to produce at least one magnified image of the at least one measurement object in an image plane, wherein the at least one microscope camera includes at least one image capture device configured to record a magnified image, and wherein the at least one microscope camera is at least partly arranged in the at least one tactile probe element.
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Accused Products
Abstract
A probe system for measuring a measurement object in optical and tactile fashion is provided which includes a tactile sensor. The tactile sensor includes a tactile probe element. The tactile probe element has a sensor surface and is configured to probe the measurement object in a tactile fashion at at least one probing point on the sensor surface. The probe system further includes a microscope camera which includes an illumination device configured to produce an illumination light beam. The microscope camera further includes a microscope optical unit configured to focus the illumination light beam in the probing point and to produce a magnified image of the measurement object in an image plane. The microscope camera also includes an image capture device configured to record the magnified image and is at least partly arranged in the tactile probe element.
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Citations
18 Claims
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1. A probe system for measuring at least one measurement object in an optical and tactile fashion, the probe system comprising:
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at least one tactile sensor, wherein the at least one tactile sensor includes at least one tactile probe element, wherein the at least one tactile probe element has a sensor surface, wherein the at least one tactile probe element is configured to probe the at least one measurement object in tactile fashion at at least one probing point on the sensor surface; at least one microscope camera, wherein the at least one microscope camera has at least one illumination device configured to produce an illumination light beam, wherein the at least one microscope camera includes at least one microscope optical unit configured to focus the illumination light beam in the at least one probing point and to produce at least one magnified image of the at least one measurement object in an image plane, wherein the at least one microscope camera includes at least one image capture device configured to record a magnified image, and wherein the at least one microscope camera is at least partly arranged in the at least one tactile probe element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification