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SEMICONDUCTOR PACKAGE DEVICE

  • US 20190107897A1
  • Filed: 10/05/2017
  • Published: 04/11/2019
  • Est. Priority Date: 10/05/2017
  • Status: Active Grant
First Claim
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1. An electronic device, comprising:

  • a piezoelectric module comprising;

    a substrate defining an opening penetrating the substrate; and

    a piezoelectric element disposed on the substrate and across the opening of the substrate;

    a sensing module disposed over the piezoelectric module; and

    a buffer element disposed between the piezoelectric module and the sensing module.

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