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MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES

  • US 20190119104A1
  • Filed: 07/13/2016
  • Published: 04/25/2019
  • Est. Priority Date: 07/13/2016
  • Status: Active Grant
First Claim
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1. A microelectromechanical systems (MEMS) device comprising:

  • a number of silicon dies overmolded with an overmold material;

    a number of active areas formed on the silicon dies, the active areas comprising at least one sensor to sense a number of attributes of a fluid introduced to the at least one sensor; and

    a fan-out layer coupled to the silicon dies, the fan-out layer comprising a number of fluid channels formed therein that interface with the active areas of the silicon dies and allow the fluid to flow to the at least one sensor.

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