STRAIN SENSING ELEMENT, PRESSURE SENSOR, MICROPHONE, BLOOD PRESSURE SENSOR, AND TOUCH PANEL

• US 20190128752A1
• Filed: 12/27/2018
• Published: 05/02/2019
• Est. Priority Date: 09/20/2013
• Status: Active Grant

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: KAJI, Shiori, Fukuzawa, Hideaki, Fuji, Yoshihiko
• Granted Patent: US 10,444,085 B2
• Time in Patent Office: Days
• CPC Class Codes: G01L 1/12 by measuring variations in the magnetic properties of materials resulting from the application of stress
• CPC Class Codes: G01L 1/125 by using magnetostrictive means magnetostrictive sensors H10N35/101
• CPC Class Codes: G01L 9/16 by making use of variations in the magnetic properties of material resulting from the application of stress

Abstract

The disclosure relates to a strain sensing element provided on a deformable substrate. The strain sensing element includes: a first magnetic layer; a second magnetic layer; and an intermediate layer. The second magnetic layer includes Fe_1-yB_y (0<y≤0.3). Magnetization of the second magnetic layer changes according to deformation of the substrate. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.

Claims

1. A strain sensing element provided on a deformable substrate, comprising:

a first magnetic layer;

a second magnetic layer including Fe_1-yB_y (0<

y≤

0.3); and

an intermediate layer provided between the first magnetic layer and the second magnetic layer,

wherein a first part of the Fe_1-yB_y (0<

y≤

0.3) is amorphous and a second part of the Fe_1-yB_y (0<

y≤

0.3) is not amorphous.