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CUTTING APPARATUS

  • US 20190134837A1
  • Filed: 10/30/2018
  • Published: 05/09/2019
  • Est. Priority Date: 11/06/2017
  • Status: Active Grant
First Claim
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1. A cutting apparatus comprising:

  • a holding table having a rectangular holding surface holding a rectangular plate-shaped workpiece;

    a rotating unit rotating the holding table with a center of the holding table as an axis;

    a cutting unit having a cutting blade mounted to a rotatable spindle and cutting the plate-shaped workpiece held on the holding table;

    a sensor unit in which a light projection section projecting detection light and a light reception section receiving the detection light are disposed to face each other, the sensor unit detecting a tip of the cutting blade entering between the light projection section and the light reception section;

    a Z moving unit causing the cutting unit to move in a Z direction which is a direction perpendicular to the rectangular holding surface;

    a Y moving unit causing the cutting unit to move in a Y direction which is an axial direction of the spindle and orthogonal to the Z direction; and

    an X moving unit causing the holding table to move in an X direction which is a cutting direction of the cutting blade and orthogonal to the Z direction and the Y direction,wherein the rectangular holding surface has short sides and long sides, andthe sensor unit has an upper end disposed to be lower than a lower end of the holding table in the Z direction and is located below the axis of the spindle or an extension region of the axis, and when the short sides of the rectangular holding surface are set parallel to the Y direction, an upper side of the sensor unit is opened to allow the cutting blade to enter between the light projection section and the light reception section.

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