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FLEXIBLE ARRAY SUBSTRATE AND METHOD FOR MANUFACTURING SAME

  • US 20190157584A1
  • Filed: 11/30/2017
  • Published: 05/23/2019
  • Est. Priority Date: 11/22/2017
  • Status: Active Grant
First Claim
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1. A method for manufacturing a flexible array substrate, comprising:

  • providing a substrate;

    forming a first graphene layer on the substrate, and patterning the first graphene layer to form a gate electrode and a scan line;

    forming a first insulation layer on the substrate, the gate electrode, and the scan line;

    forming a metal-oxide-semiconductor layer on the first insulation layer, and patterning the metal-oxide-semiconductor layer to form an electrically conductive channel;

    forming a second graphene layer on the electrically conductive channel and the first insulation layer, and patterning the second graphene layer to form a source electrode, a drain electrode, and a data line, wherein the electrically conductive channel is connected to the source electrode and the drain electrode;

    forming a second insulation layer on the substrate, the source electrode, the drain electrode, and the data line; and

    forming a carbon nanotube layer on the second insulation layer, and patterning the carbon nanotube layer to form a pixel electrode;

    wherein the pixel electrode is electrically connected to the drain electrode via a through-hole;

    wherein the substrate is a transparent glass substrate or a plastic substrate; and

    wherein the first insulation layer includes a third insulation layer and a fourth insulation layer disposed on the third insulation layer; and

    the third insulation layer is made of an organic resin, and the fourth insulation layer is made of oxide, nitride, or oxynitride.

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