ELECTRO-OPTICAL DEVICE, METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS
First Claim
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1. An electro-optical device comprising:
- a substrate;
a torsion hinge disposed above the substrate;
a conductive layer disposed above the torsion hinge;
a support post which protrudes from the conductive layer to the torsion hinge, and which includes a resin; and
a reflective layer which completely covers a surface of the conductive layer and the resin, the reflective layer contacting the resin,wherein a height difference between a height from the torsion hinge to a surface of the resin at a side opposite to the substrate and a height from the torsion hinge to a surface of the conductive layer at a side opposite to the substrate is equal to 0.2 μ
m or less, andwherein a depth of the support post is larger than an inner diameter of the support post.
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Abstract
An electro-optical device is configured by a laminated body of a second conductive layer and a reflective layer for a mirror. The second conductive layer includes a mirror support post facing a concave portion at a side opposite to a substrate, and a flat plate which extends from an end portion of the mirror support post and faces the substrate. The concave portion is filled with the resin. Surfaces of the flat plate and the resin configure a continuous plane. The reflective layer for a mirror is laminated on a surface of the resin at a side opposite to the substrate, and a surface of the flat plate of the second conductive layer at a side opposite to the substrate.
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Citations
8 Claims
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1. An electro-optical device comprising:
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a substrate; a torsion hinge disposed above the substrate; a conductive layer disposed above the torsion hinge; a support post which protrudes from the conductive layer to the torsion hinge, and which includes a resin; and a reflective layer which completely covers a surface of the conductive layer and the resin, the reflective layer contacting the resin, wherein a height difference between a height from the torsion hinge to a surface of the resin at a side opposite to the substrate and a height from the torsion hinge to a surface of the conductive layer at a side opposite to the substrate is equal to 0.2 μ
m or less, andwherein a depth of the support post is larger than an inner diameter of the support post. - View Dependent Claims (3)
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2. An electro-optical device comprising:
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a substrate; a torsion hinge disposed above the substrate; a flat plate disposed on the torsion hinge; a supporting portion in which a resin is filled in a recess protruding from the flat plate toward the torsion hinge; and a reflective layer which completely covers a surface of the flat plate in a plan view, wherein a height of the resin is larger than a diameter of the resin, and wherein a height difference between a height from the torsion hinge to a surface of the resin at a side opposite to the substrate and a height from the torsion hinge to a surface of the flat plate at a side opposite to the substrate is equal to 0.2 μ
m or less. - View Dependent Claims (4)
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5. An electro-optical device comprising:
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a substrate; a torsion hinge disposed above the substrate; a conductive layer disposed above the torsion hinge; and a reflective layer disposed on the conductive layer, wherein the conductive layer includes a support post and flat plate, the support post is formed continuously with the flat plate, protrudes toward the torsion hinge and contacts the torsion hinge, the reflective layer contacts the flat plate, and A>
B, whereinA is a thickness of the flat plate, and B is a thickness of the reflective layer. - View Dependent Claims (6, 7, 8)
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Specification
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Current AssigneeSeiko Epson Corporation (Seiko Group)
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Original AssigneeSeiko Epson Corporation (Seiko Group)
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InventorsITO, Satoshi
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Granted Patent
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Time in Patent OfficeDays
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Field of Search
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US Class Current
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CPC Class CodesG02B 26/008 in the form of devices for ...G02B 26/0833 the reflecting element bein...
