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ELECTRO-OPTICAL DEVICE, METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS

  • US 20190171002A1
  • Filed: 01/29/2019
  • Published: 06/06/2019
  • Est. Priority Date: 04/01/2015
  • Status: Active Grant
First Claim
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1. An electro-optical device comprising:

  • a substrate;

    a torsion hinge disposed above the substrate;

    a conductive layer disposed above the torsion hinge;

    a support post which protrudes from the conductive layer to the torsion hinge, and which includes a resin; and

    a reflective layer which completely covers a surface of the conductive layer and the resin, the reflective layer contacting the resin,wherein a height difference between a height from the torsion hinge to a surface of the resin at a side opposite to the substrate and a height from the torsion hinge to a surface of the conductive layer at a side opposite to the substrate is equal to 0.2 μ

    m or less, andwherein a depth of the support post is larger than an inner diameter of the support post.

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