MICROSCOPE

• US 20190187452A1
• Filed: 12/15/2017
• Published: 06/20/2019
• Est. Priority Date: 12/15/2017
• Status: Abandoned Application

• Current Assignee: Shimadzu Corporation
• Original Assignee: Shimadzu Corporation
• Inventors: NAKATA, Yasushi
• Application Number:
  US15/843,032
• Publication Number:
  US 20190187452A1
• Time in Patent Office: Days
• CPC Class Codes: G01N 21/35 using infrared light G01N21/39 takes precedence
• CPC Class Codes: G02B 21/002 Scanning microscopes scanning near field optical microscopes G01Q60/18
• CPC Class Codes: G02B 21/26 Stages; Adjusting means therefor
• CPC Class Codes: G02B 21/367 providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
• CPC Class Codes: H04N 25/48 Increasing resolution by shifting the sensor relative to the scene
• CPC Class Codes: H04N 5/33 Transforming infrared radiation cameras or camera modules for generating image signals from infrared radiation H04N23/20; circuitry of SSIS for transforming infrared radiation into image signals H04N25/20

Abstract

A microscope including a measurement light source for emitting measurement light to a measurement point on a sample; a detector for detecting measurement light from the measurement point on the sample; an XY stage mechanism capable of moving a sample stage on which the sample is placed; an input device for inputting input information serving as a measurement range on the sample comprising a plurality of measurement points; and a controller part for controlling the XY stage mechanism and obtaining measurement light information in the measurement range on the sample on the basis of the input information.

Claims

1. A microscope, comprising:

a measurement light source for emitting measurement light to a measurement point on a sample;

a detector for detecting measurement light from the measurement point on the sample;

an XY stage mechanism capable of moving a sample stage on which the sample is placed;

an input device for inputting input information serving as a measurement range on the sample comprising a plurality of measurement points; and

a controller for controlling the XY stage mechanism and obtaining measurement light information in the measurement range on the sample on the basis of the input information;

the controller executing an (n-1)th information acquisition step of controlling the XY stage mechanism on the basis of (n-1)^th information serving as an (n-1)^th measurement range inputted by the input device, obtaining measurement light information in the (n-1)^th measurement range, and storing the information in a storage, and then executing an n^th acquisition step of controlling the XY stage mechanism on the basis of nth input information serving as an n^th measurement range inputted by the input range and acquiring measurement light information of the n^th measurement range; and

in the n^th acquisition step, the controller using measurement light information in an overlapping part stored in the storage in the (n-1)^th acquisition step to create measurement light information of the nth measurement range without acquiring measurement light information in an overlapping portion of the n^th measurement range overlapping the (n-1)^th measurement range.

2. The microscope according to claim 1, wherein measurement points arranged at equal intervals in an X-direction and a Y-direction are set in the n^th measurement range and the (n-1)^th measurement range.

3. The microscope according to claim 1, comprising:

a visible light source for emitting visible light in a region including the measurement point on the sample; and

an image acquisition device for acquiring an optical image and displaying the optical image on a display device when visible light from the region including the measurement point on the sample is incident on a detection surface;

wherein the input information is inputted using the optical image.

4. The microscope according to claim 2, comprising:

a visible light source for emitting visible light in a region including the measurement point on the sample; and

an image acquisition device for acquiring an optical image and displaying the optical image on a display device when visible light from the region including the measurement point on the sample is incident on a detection surface;

wherein the input information is inputted using the optical image.

5. A method, comprising:

emitting measurement light to a measurement point on a sample;

detecting measurement light from the measurement point on the sample;

moving a sample stage on which the sample is placed;

inputting input information serving as a measurement range on the sample comprising a plurality of measurement points; and

controlling the XY stage mechanism and obtaining measurement light information in the measurement range on the sample on the basis of the input information;

wherein the control includes

executing an (n-1)th information acquisition step of controlling the XY stage mechanism on the basis of (n-1)^th information serving as an (n-1)^th measurement range inputted by the input device, obtaining measurement light information in the (n-1)^th measurement range, and storing the information in a storage, and then executing an n^th acquisition step of controlling the XY stage mechanism on the basis of nth input information serving as an n^th measurement range inputted by the input range and acquiring measurement light information of the n^th measurement range; and

in the n^th acquisition step, using measurement light information in an overlapping part stored in the storage in the (n-1)^th acquisition step to create measurement light information of the nth measurement range without acquiring measurement light information in an overlapping portion of the n^th measurement range overlapping the (n-1)^th measurement range.

6. The method according to claim 5, wherein measurement points arranged at equal intervals in an X-direction and a Y-direction are set in the n^th measurement range and the (n-1)^th measurement range.

7. The method according to claim 5, comprising:

emitting visible light in a region including the measurement point on the sample; and

acquiring an optical image and displaying the optical image on a display device when visible light from the region including the measurement point on the sample is incident on a detection surface;

wherein the input information is inputted using the optical image.

8. The method according to claim 6, comprising:

emitting visible light in a region including the measurement point on the sample; and

acquiring an optical image and displaying the optical image on a display device when visible light from the region including the measurement point on the sample is incident on a detection surface;

wherein the input information is inputted using the optical image.