LOAD LOCK SYSTEM FOR CHARGED PARTICLE BEAM IMAGING
3 Assignments
0 Petitions
Accused Products
Abstract
A load lock system for charged particle beam imaging with a particle shielding plate, a bottom seal plate and a plurality of sensor units is provided. The sensor units are located above the wafer, the shield plate is designed to have a few number of screws, and the bottom seal plate contains no cable, no contact sensors and fewer screws used. In the invention, the system is designed to improve the contamination particles from components in the load lock system of charged particle beam inspection tool and also to simplify its assembly.
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Citations
46 Claims
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1-26. -26. (canceled)
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27. An apparatus comprising:
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a holder configured to hold a sample; a particle shielding plate disposed above the holder; and a position detecting unit including an emitter configured to project a light beam toward the holder, wherein the particle shielding plate includes an opening corresponding to the position detecting unit. - View Dependent Claims (31, 32, 33, 40, 41)
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42. A method for shielding components in a charged particle beam inspection tool from contamination particles, comprising:
irradiating, by a position detecting unit, a sample provided on a holder through an opening in a particle shielding plate that is disposed above the holder. - View Dependent Claims (43, 43, 44, 45, 46)
Specification