SEALED CAVITY STRUCTURES WITH A PLANAR SURFACE
First Claim
Patent Images
1. A structure comprising a cavity formed in a substrate material, the cavity being covered with epitaxial material that has an upper planar surface, wherein the cavity comprises a trench which includes a curvature at its open end and which is under a transistor.
3 Assignments
0 Petitions
Accused Products
Abstract
The present disclosure relates to semiconductor structures and, more particularly, to sealed cavity structures having a planar surface and methods of manufacture. The structure includes a cavity formed in a substrate material and which has a curvature at its upper end. The cavity is covered with epitaxial material that has an upper planar surface.
-
Citations
18 Claims
- 1. A structure comprising a cavity formed in a substrate material, the cavity being covered with epitaxial material that has an upper planar surface, wherein the cavity comprises a trench which includes a curvature at its open end and which is under a transistor.
-
2. (canceled)
-
13. A structure comprising:
-
a substrate material; a cavity formed in the substrate which includes a trench having a curved edge portion at its upper end; a first material within the trench which migrates to the upper end of the trench; and a second material which covers the first material and which covers the trench, the second material having a planar surface wherein the first material is SiGe, the second material is Si material, the SiGe has a Ge concentration of about 5-30%, and after reflow, the SiGe has a top surface that is flat. - View Dependent Claims (15, 16)
-
-
14. (canceled)
-
17. A structure comprising:
-
a substrate material; a cavity formed in the substrate which includes a trench having a curved edge portion at its upper end; a first material within the trench which migrates to the upper end of the trench; and a second material which covers the first material and which covers the trench, the second material having a planar surface; a gate structure with a source region and a drain region, wherein the cavity is under one of; only the source region and the drain region; the source region and the drain region and extends under the gate structure; only under the gate structure on the planar surface; and the gate structure and extends partially under the source region and the drain region.
-
-
18-20. -20. (canceled)
Specification