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PLATING METHOD AND PLATING APPARATUS

  • US 20190249325A1
  • Filed: 04/23/2019
  • Published: 08/15/2019
  • Est. Priority Date: 03/27/2012
  • Status: Active Grant
First Claim
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1. A method of checking leakage of a substrate holder, comprising:

  • supporting one surface of a substrate with a first holding member of the substrate holder while placing a second holding member of the substrate holder in contact with other surface of the substrate, with the other surface of the substrate exposed through an opening of the second holding member;

    sealing a gap between the first holding member and the second holding member with a first protruding portion of the second holding member, and sealing a peripheral portion of the substrate with a second protruding portion of the second holding member, thereby forming an internal space in the substrate holder with the first holding member, the second holding member, and the substrate;

    performing a first-stage leakage test of the substrate holder by producing a vacuum in the internal space and checking whether pressure in the internal space reaches a predetermined vacuum pressure within a predetermined period of time to check a sealed state provided by the first protruding portion and the second protruding portion; and

    performing a second-stage leakage test of the substrate holder, which has passed the first-stage leakage test, by closing off the internal space after producing the vacuum therein and checking whether a change in the pressure in the internal space reaches a predetermined value within a predetermined period of time to further check the sealed state provided by the first protruding portion and the second protruding portion.

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