A METHOD FOR PROCESSING SILICON MATERIAL

• US 20190252572A1
• Filed: 06/06/2017
• Published: 08/15/2019
• Est. Priority Date: 06/06/2016
• Status: Active Grant

• Current Assignee: NewSouth Innovations Pty Limited (University Of New South Wales)
• Original Assignee: NewSouth Innovations Pty Limited (University Of New South Wales)
• Inventors: Wenham, Stuart Ross, Ciesla, Alison, Hallam, Brett Jason, Chan, Catherine Emily, Chong, Chee Mun, Chen, Ran, Abbott, Malcolm David, Payne, David Neil
• Granted Patent: US 10,461,212 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 31/022425 for solar cells
• CPC Class Codes: H01L 31/068 the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
• CPC Class Codes: H01L 31/1804 comprising only elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 31/1864 Annealing
• CPC Class Codes: H01L 31/1868 Passivation
• CPC Class Codes: Y02E 10/547 Monocrystalline silicon PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

The present disclosure provides methods for manufacturing a photovoltaic device that comprise a sequence of annealing steps and exposure to electromagnetic radiation during annealing that allow passivating electrically active defects and stabilising the performance of photovoltaic device.

Claims

1. A method for manufacturing a photovoltaic device, the method comprising the steps of:

providing a substrate that comprises a silicon p-n junction;

annealing the substrate at a temperature between 500°

C. and 700°

C. in the presence of a hydrogen source for a first predetermined period of time to allow hydrogen atoms to penetrate into silicon material of the silicon p-n junction; and

exposing the substrate to electromagnetic radiation while the substrate is kept at a temperature between 150°

C. and 400°

C. in a manner such that photons with an energy higher than that of a bandgap of the silicon material are provided at a radiation intensity of at least 20 mW/cm² and an excess of minority carriers is created in the silicon material;

wherein, during the steps of annealing the substrate and exposing the substrate to electromagnetic radiation, electrically active defects in the silicon material are passivated.

3. The method of claim 1 wherein the first period of time is between 1 second and 5 minutes.

7. The method of claim 1 wherein the method further comprises the step of forming a plurality of metallic electrodes on a surface of the substrate and the step of annealing the substrate is performed in a manner such that an electrical contact is formed between the electrodes and the silicon p-n junction.

8. The method of claim 1 wherein the method further comprises exposing the substrate to electromagnetic radiation with an energy sufficient to generate electron pairs within the silicon during the step of annealing the substrate for a first predetermined period of time or during the step of annealing the substrate for a further predetermined period of time.

9. The method of claim 1 wherein the open circuit voltage of the photovoltaic device decreases less than 1% relative while the photovoltaic device is exposed to 0.5 sun illumination for 500 hours at 70°

C.

10. The method of claim 1 wherein the conversion efficiency of the photovoltaic device decreases less than 5% relative while the photovoltaic device is exposed to 0.5 sun illumination for 500 hours at 70°

C.

14. The method of claim 1 wherein the method further comprises the step of varying at least one parameter of the radiation during exposure to control the amount of hydrogen atoms in a given charge state.

15. The method of claim 1 wherein the temperature of the substrate during exposure to electromagnetic radiation is between 150°

C. and 250°

C.

16. The method of claim 1 wherein the duration of the step of exposing the substrate to electromagnetic radiation is between 10 seconds and 20 minutes.

17. A silicon photovoltaic device manufactured in accordance with claim 1.

2. A method for manufacturing a photovoltaic device, the method comprising the steps of:

providing a substrate that comprises a silicon p-n junction;

annealing the substrate at a temperature between 300°

C. and 700°

C. in the presence of a hydrogen source for a first predetermined period of time to allow hydrogen atoms to penetrate into silicon material of the p-n junction;

exposing the substrate to electromagnetic radiation while the substrate is kept at a temperature between 150°

C. and 400°

C. in a manner such that photons with an energy higher than that of a bandgap of the silicon are provided at a radiation intensity of at least 20 mW/cm² and an excess of minority carriers is created in the silicon material; and

further annealing the substrate at a temperature between 200°

C. and 500°

C. for a second predetermined period of time to reduce contact resistance between the metallic electrodes and the silicon material;

wherein, during the steps of annealing the substrate and exposing the substrate to electromagnetic radiation, electrically active defects in the silicon material are passivated.

11. The method of claim 2 wherein the second period of time is between 1 minute and 5 minutes.

4. A method for manufacturing a photovoltaic device, the method comprising the steps of:

providing a substrate that comprises a silicon p-n junction;

annealing the substrate at a temperature between 700°

C. and 900°

C. in the presence of a hydrogen source for a first predetermined period of time to allow hydrogen atoms to penetrate into silicon material of the silicon p-n junction;

annealing the substrate at a temperature between 600°

C. and 700°

C. for a further predetermined period of time; and

exposing the substrate to electromagnetic radiation while the substrate is kept at a temperature between 150°

C. and 400°

C. in a manner such that photons with an energy higher than that of a bandgap of the silicon are provided at a radiation intensity of at least 20 mW/cm² and an excess of minority carriers is created in the silicon material;

wherein, during the steps of annealing the substrate and exposing the substrate to electromagnetic radiation, electrically active defects in the silicon material are passivated.

6. The method of claim 4 wherein the first period of time is between 1 second and 5 seconds.

12. The method of claim 4 wherein the further period of time is between 10 minutes and 20 minutes.

13. The method of claim 4 wherein the method further comprises the step of providing the source of hydrogen atoms in the photovoltaic device.

18. A silicon screen printed solar cell manufactured in accordance with the method of claim 4.

5. A method for manufacturing a photovoltaic device, the method comprising the steps of:

providing a substrate that comprises a silicon p-n junction;

annealing the substrate at a temperature between 700°

C. and 900°

C. in the presence of a hydrogen source for a first predetermined period of time to allow hydrogen atoms to penetrate into silicon material of the p-n junction;

annealing the substrate at a temperature between 250°

C. and 700°

C. for a further predetermined period of time; and

exposing the substrate to electromagnetic radiation while the substrate is kept at a temperature between 150°

C. and 400°

C. in a manner such that photons with an energy higher than that of a bandgap of the silicon are provided at a radiation intensity of at least 20 mW/cm² and an excess of minority carriers is created in the silicon material;

further annealing the substrate at a temperature between 200°

C. and 500°

C. for a second predetermined period of time to reduce contact resistance between the metallic electrodes and the silicon material;

wherein, during the steps of annealing the substrate and exposing the substrate to electromagnetic radiation, electrically active defects in the silicon material are passivated.

19. A method for stabilising the performance of a silicon screen printed photovoltaic device, the method comprising the steps of:

providing a silicon screen printed photovoltaic device;

annealing the screen printed photovoltaic device at a temperature between 500°

C. and 700°

C. for a predetermined period of time; and

exposing the device to electromagnetic radiation while the device is kept at a temperature between 150°

C. and 400°

C. in a manner such that photons with an energy higher than that of a bandgap of silicon material provide a radiation intensity of at least 20 mW/cm² and an excess of minority carriers is created in the silicon material;

wherein, during the steps of annealing the device and exposing the device to electromagnetic radiation, electrically active defects in the silicon material are passivated.

20. The method of claim 19 wherein the method further comprises the step of annealing the substrate at a temperature between 200°

C. and 500°

C. for a second predetermined period of time to reduce contact resistance.

21. (canceled)