OPTICAL MEASURING DEVICE

• US 20190277621A1
• Filed: 12/17/2018
• Published: 09/12/2019
• Est. Priority Date: 03/12/2018
• Status: Active Grant

• Current Assignee: Omron Corporation
• Original Assignee: Omron Corporation
• Inventors: OKUDA, Takahiro, MARUKAWA, Mariko, MORINO, Hisayasu
• Granted Patent: US 11,231,270 B2
• Time in Patent Office: Days
• CPC Class Codes: G01B 11/0608 Height gauges
• CPC Class Codes: G01B 11/2441 using interferometry
• CPC Class Codes: G01B 2210/50 Using chromatic effects to achieve wavelength-dependent depth resolution
• CPC Class Codes: G01B 9/02042 Confocal imaging
• CPC Class Codes: G01B 9/02056 Passive reduction of errors

Abstract

The optical measuring device includes a light source that outputs light of a plurality of wavelengths; a sensor head including a conversion lens that converts light incident via a light guide part, which includes a plurality of cores, into parallel light, and an objective lens that irradiates the light in which chromatic aberration is generated to a measurement object; and a spectroscope that acquires reflected light reflected by the measurement object and condensed by the sensor head via the light guide part and measures a spectrum of the reflected light. In the sensor head, a shield that shields light is arranged between the conversion lens and the objective lens to inhibit light emitted from one core among the plurality of cores included in the light guide part from entering cores other than the one core as the reflected light.

Claims

1. An optical measuring device, comprising:

a light source, outputting a light of a plurality of wavelengths;

a sensor head, comprising a conversion lens and an objective lens, wherein the conversion lens converts the light incident via a light guide part, which comprises a plurality of cores, into parallel light, and the objective lens irradiates the light in which chromatic aberration is generated to a measurement object; and

a spectroscope, acquiring reflected light reflected by the measurement object and condensed by the sensor head via the light guide part, and measuring a spectrum of the reflected light,

wherein in the sensor head, a shield that shields light is arranged between the conversion lens and the objective lens to inhibit light emitted from one core among the plurality of cores included in the light guide part from entering cores other than the one core as the reflected light.

2. The optical measuring device according to claim 1, wherein the shield is arranged corresponding to an arrangement of the plurality of cores.

3. The optical measuring device according to claim 2, wherein the sensor head accommodates a diffraction lens comprising a diffraction surface formed with a diffraction pattern, which is for generating chromatic aberration in the incident light along a direction of an optical axis, between the conversion lens and the objective lens, and

the shield is arranged on a surface located on a side opposite to the diffraction surface in the diffraction lens.

4. The optical measuring device according to claim 1, wherein the sensor head accommodates a diffraction lens comprising a diffraction surface formed with a diffraction pattern, which is for generating chromatic aberration in the incident light along a direction of an optical axis, between the conversion lens and the objective lens, and

the shield is arranged on a surface located on a side opposite to the diffraction surface in the diffraction lens.

5. The optical measuring device according to claim 4, wherein the shield is arranged on the surface in a four-way point pattern, a cross pattern, or a ring pattern.

6. The optical measuring device according to claim 3, wherein the shield is arranged on the surface in a four-way point pattern, a cross pattern, or a ring pattern.

7. The optical measuring device according to claim 6, wherein the light is a white light.

8. The optical measuring device according to claim 5, wherein the light is a white light.

9. The optical measuring device according to claim 4, wherein the light is a white light.

10. The optical measuring device according to claim 3, wherein the light is a white light.

11. The optical measuring device according to claim 2, wherein the light is a white light.

12. The optical measuring device according to claim 1, wherein the light is a white light.

13. The optical measuring device according to claim 6, wherein the optical measuring device is a confocal measuring device that measures a displacement of the measurement object by using a confocal optical system.

14. The optical measuring device according to claim 5, wherein the optical measuring device is a confocal measuring device that measures a displacement of the measurement object by using a confocal optical system.

15. The optical measuring device according to claim 4, wherein the optical measuring device is a confocal measuring device that measures a displacement of the measurement object by using a confocal optical system.

16. The optical measuring device according to claim 3, wherein the optical measuring device is a confocal measuring device that measures a displacement of the measurement object by using a confocal optical system.

17. The optical measuring device according to claim 2, wherein the optical measuring device is a confocal measuring device that measures a displacement of the measurement object by using a confocal optical system.

18. The optical measuring device according to claim 1, wherein the optical measuring device is a confocal measuring device that measures a displacement of the measurement object by using a confocal optical system.