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SURFACE INSPECTION SYSTEM, APPARATUS, AND METHOD

  • US 20190293552A1
  • Filed: 03/21/2018
  • Published: 09/26/2019
  • Est. Priority Date: 03/21/2018
  • Status: Active Grant
First Claim
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1. An apparatus for surface inspection, the apparatus comprising:

  • a terahertz emitter oriented to emit energy toward a surface having a surface layer disposed on the surface in proximity of a surface feature coupled to the surface;

    a detector positioned to receive terahertz energy from the terahertz emitter that is reflected by the surface; and

    a computing device in signal receiving communication with the detector, wherein the computing device is configured to detect the surface feature using a signal from the detector.

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