SURFACE INSPECTION SYSTEM, APPARATUS, AND METHOD
First Claim
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1. An apparatus for surface inspection, the apparatus comprising:
- a terahertz emitter oriented to emit energy toward a surface having a surface layer disposed on the surface in proximity of a surface feature coupled to the surface;
a detector positioned to receive terahertz energy from the terahertz emitter that is reflected by the surface; and
a computing device in signal receiving communication with the detector, wherein the computing device is configured to detect the surface feature using a signal from the detector.
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Abstract
An apparatus for surface inspection comprises a terahertz emitter, a detector, and a computing device. The terahertz emitter is oriented to emit energy toward a surface having a surface layer disposed on the surface in a proximity of a surface feature. The detector is positioned to receive the energy from the terahertz emitter that is reflected by the surface. The computing device is in signal communication with the detector and is configured to detect the surface feature using a signal from the detector.
7 Citations
21 Claims
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1. An apparatus for surface inspection, the apparatus comprising:
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a terahertz emitter oriented to emit energy toward a surface having a surface layer disposed on the surface in proximity of a surface feature coupled to the surface; a detector positioned to receive terahertz energy from the terahertz emitter that is reflected by the surface; and a computing device in signal receiving communication with the detector, wherein the computing device is configured to detect the surface feature using a signal from the detector. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A system for surface inspection, the system comprising:
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a robotic arm; an end effector coupled to a process end of the robotic arm; an apparatus for surface inspection coupled to the end effector, wherein the apparatus comprises; a terahertz emitter oriented to emit terahertz energy toward a surface having a surface layer disposed on the surface in a proximity of a surface feature; and a detector positioned to receive the terahertz energy from the terahertz emitter that is reflected by the surface; and a computing device in signal communication with the detector, wherein the computing device is configured to detect the surface feature using a signal from the detector. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A method for surface inspection, the method comprising:
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positioning an apparatus for surface inspection relative to a surface having a surface layer disposed on the surface; emitting a terahertz energy to impinge on the surface through the surface layer; detecting terahertz energy reflected from the surface; and detecting a surface feature of the surface through the surface layer based on an analysis of the reflected terahertz energy. - View Dependent Claims (19, 20, 21)
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Specification